Growth of diamond by rf plasma assisted chemical vapor deposition

Duane E. Meyer, Natale J. Ianno, John A. Woollam, B. Swartzlander, A. J. Nelson

Research output: Contribution to journalArticle

Abstract

Diamond particles have been produced by inductively coupled radio frequency plasma assisted chemical vapor deposition. Analysis indicates that particles having a thin graphitic surface, as well as diamond particles with no surface coatings have been deposited. Scanning electron microscopy analysis shows that particles are deposited on a pedestal which Auger spectroscopy indicates to be graphitic. This phenomenon has not been previously reported in the literature.

Original languageEnglish (US)
Pages (from-to)66-69
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume969
DOIs
StatePublished - Jan 17 1989

Fingerprint

Diamond
Chemical Vapor Deposition
Strombus or kite or diamond
Chemical vapor deposition
Diamonds
Plasma
diamonds
vapor deposition
Plasmas
Spectroscopy
Coatings
Scanning electron microscopy
Scanning Electron Microscopy
Auger spectroscopy
Coating
radio frequencies
coatings
scanning electron microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Growth of diamond by rf plasma assisted chemical vapor deposition. / Meyer, Duane E.; Ianno, Natale J.; Woollam, John A.; Swartzlander, B.; Nelson, A. J.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 969, 17.01.1989, p. 66-69.

Research output: Contribution to journalArticle

Meyer, Duane E. ; Ianno, Natale J. ; Woollam, John A. ; Swartzlander, B. ; Nelson, A. J. / Growth of diamond by rf plasma assisted chemical vapor deposition. In: Proceedings of SPIE - The International Society for Optical Engineering. 1989 ; Vol. 969. pp. 66-69.
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