Growth of (001)-oriented PZT thin films on amorphous SiO2 by pulsed laser deposition

Jing Zhao, Li Lu, C. V. Thompson, Y. F. Lu, W. D. Song

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Using pulsed laser deposition (PLD), (001)-textured Nb-doped Pb (Zr0.52Ti0.48)O3 (PZT) films with highly restricted in-plane crystallographic alignments were successfully deposited on Si (001) wafers covered with amorphous SiO2. MgO and SrTiO3 (STO) films were used as buffer and seed layers, respectively, for growth of YBa2Cu3O7 (YBCO) and PZT layers. The YBCO layer can serve as a bottom electrode for activation of PZT films. Variations in the deposition conditions for the MgO films were found to play a key role in the subsequent deposition of the oriented PZT thin films. MgO films deposited at an O2 partial pressure of 200 mtorr, have a strong (100) texture, leading to subsequent deposition of PZT films with both a strong (100) texture and highly restricted in-plane orientations. Although the MgO and STO films show very strong crystallographic textures, their in-plane orientations are random. The restricted in-plane orientations were only observed in the YBCO and PZT films.

Original languageEnglish (US)
Pages (from-to)221-224
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
StatePublished - Jan 1 2002

Fingerprint

Pulsed Laser Deposition
SiO2
Pulsed laser deposition
pulsed laser deposition
Thin Films
Thin films
thin films
Texture
textures
Textures
Partial pressure
Wafer
Electrode
partial pressure
Seed
Buffer
Activation
seeds
Buffers
Alignment

Keywords

  • MgO
  • PLD
  • PZT
  • SiO
  • YBCO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Growth of (001)-oriented PZT thin films on amorphous SiO2 by pulsed laser deposition. / Zhao, Jing; Lu, Li; Thompson, C. V.; Lu, Y. F.; Song, W. D.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4426, 01.01.2002, p. 221-224.

Research output: Contribution to journalArticle

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