Grating fabrication with CW CO2 laser irradiation

D. J. Wu, C. W. An, M. H. Hong, W. J. Wang, Y. Z. Peng, Y. F. Lu

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 μm.

Original languageEnglish (US)
Pages (from-to)266-271
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4915
DOIs
StatePublished - Jan 1 2002
EventLasers in Materials Processing and Manufacturing - Shanghai, China
Duration: Oct 16 2002Oct 18 2002

Fingerprint

CO2 Laser
Continuous wave lasers
Laser beam effects
Irradiation
Gratings
Fabrication
gratings
fabrication
Dosimetry
irradiation
Dose
Substrate
Laser
lasers
Scanning
Glass
Laser Scanning
Substrates
Ridge
Multipath

Keywords

  • CW CO laser
  • Glass substrate
  • Grating
  • Linear polarization
  • Multi-path scanning
  • Periodic structure

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Grating fabrication with CW CO2 laser irradiation. / Wu, D. J.; An, C. W.; Hong, M. H.; Wang, W. J.; Peng, Y. Z.; Lu, Y. F.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4915, 01.01.2002, p. 266-271.

Research output: Contribution to journalConference article

Wu, D. J. ; An, C. W. ; Hong, M. H. ; Wang, W. J. ; Peng, Y. Z. ; Lu, Y. F. / Grating fabrication with CW CO2 laser irradiation. In: Proceedings of SPIE - The International Society for Optical Engineering. 2002 ; Vol. 4915. pp. 266-271.
@article{2a6652892afd48d5bd0709dcafa8681d,
title = "Grating fabrication with CW CO2 laser irradiation",
abstract = "In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 μm.",
keywords = "CW CO laser, Glass substrate, Grating, Linear polarization, Multi-path scanning, Periodic structure",
author = "Wu, {D. J.} and An, {C. W.} and Hong, {M. H.} and Wang, {W. J.} and Peng, {Y. Z.} and Lu, {Y. F.}",
year = "2002",
month = "1",
day = "1",
doi = "10.1117/12.482897",
language = "English (US)",
volume = "4915",
pages = "266--271",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

TY - JOUR

T1 - Grating fabrication with CW CO2 laser irradiation

AU - Wu, D. J.

AU - An, C. W.

AU - Hong, M. H.

AU - Wang, W. J.

AU - Peng, Y. Z.

AU - Lu, Y. F.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 μm.

AB - In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 μm, and the grating period was about 8 μm.

KW - CW CO laser

KW - Glass substrate

KW - Grating

KW - Linear polarization

KW - Multi-path scanning

KW - Periodic structure

UR - http://www.scopus.com/inward/record.url?scp=0036442087&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036442087&partnerID=8YFLogxK

U2 - 10.1117/12.482897

DO - 10.1117/12.482897

M3 - Conference article

AN - SCOPUS:0036442087

VL - 4915

SP - 266

EP - 271

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -