Generalized infrared ellipsometry study of thin epitaxial AlN layers with complex strain behavior

V. Darakchieva, Mathias Schubert, J. Birch, A. Kasic, S. Tungasmita, T. Paskova, B. Monemar

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

The effect of film thickness on the strain and structural properties of thin epitaxial AlN films has been investigated, and a sub-layer model of the degree of strain and related defects for all films is suggested. The vibrational properties of the films have been studied by generalized infrared spectroscopic ellipsometry. The proposed sub-layer model has been successfully applied to the analysis of the ellipsometry data trough model calculations of the infrared dielectric function.

Original languageEnglish (US)
Pages (from-to)416-420
Number of pages5
JournalPhysica B: Condensed Matter
Volume340-342
DOIs
StatePublished - Dec 31 2003
EventProceedings of the 22nd International Conference on Defects in (ICDS-22) - Aarhus, Denmark
Duration: Jul 28 2003Aug 1 2003

Fingerprint

Epitaxial layers
Ellipsometry
ellipsometry
Infrared radiation
Spectroscopic ellipsometry
Epitaxial films
troughs
Film thickness
Structural properties
film thickness
Thin films
Defects
defects

Keywords

  • AlN
  • Infrared ellipsometry
  • Phonons
  • Strain

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Generalized infrared ellipsometry study of thin epitaxial AlN layers with complex strain behavior. / Darakchieva, V.; Schubert, Mathias; Birch, J.; Kasic, A.; Tungasmita, S.; Paskova, T.; Monemar, B.

In: Physica B: Condensed Matter, Vol. 340-342, 31.12.2003, p. 416-420.

Research output: Contribution to journalConference article

Darakchieva, V. ; Schubert, Mathias ; Birch, J. ; Kasic, A. ; Tungasmita, S. ; Paskova, T. ; Monemar, B. / Generalized infrared ellipsometry study of thin epitaxial AlN layers with complex strain behavior. In: Physica B: Condensed Matter. 2003 ; Vol. 340-342. pp. 416-420.
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AU - Monemar, B.

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