Generalized ellipsometry and complex optical systems

Research output: Contribution to journalArticle

110 Citations (Scopus)

Abstract

Extension of spectroscopic rotating-analyzer ellipsometry with automated compensator function to generalized ellipsometry (GE) is reported in order to define and determine three normalized elements of the optical Jones reflection or transmission matrices r or t, respectively. These elements can be measured regardless of the specific structural and/or anisotropic properties of a nondepolarizing sample. An analytically processed 4 × 4-matrix algebra based on the Berreman 4 × 4 formalism is reviewed to calculate the Jones reflection and transmission matrix elements for arbitrarily anisotropic and homogeneously layered systems. Special solutions are available for continuously twisted biaxial media (chiral liquid crystals), and materials with arbitrary antisymmetric dielectric properties (e.g. free-carrier magneto-optics in semiconductors). The combination of both the 4 × 4-matrix algorithm and GE allows for the analysis of complex multilayered samples with inherent and arbitrarily oriented anisotropies. We present our first applications of GE to birefringent layered dielectrics (TiO2), chiral liquid crystals, spontaneously ordered semiconductor III-V compounds (ALx-Ga1-xInP2), and polycrystalline boron nitride thin films.

Original languageEnglish (US)
Pages (from-to)323-332
Number of pages10
JournalThin Solid Films
Volume313-314
DOIs
StatePublished - Feb 13 1998

Fingerprint

Ellipsometry
Optical systems
ellipsometry
Liquid Crystals
Liquid crystals
matrices
liquid crystals
Magnetooptical effects
Boron nitride
magneto-optics
compensators
boron nitrides
Dielectric properties
dielectric properties
analyzers
algebra
Anisotropy
Semiconductor materials
formalism
Thin films

Keywords

  • Anisotropy
  • Generalized ellipsometry
  • Liquid crystals
  • Magneto-optics
  • Optical Jones matrix
  • Polycrystalline media
  • Refractive indices

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Generalized ellipsometry and complex optical systems. / Schubert, Mathias.

In: Thin Solid Films, Vol. 313-314, 13.02.1998, p. 323-332.

Research output: Contribution to journalArticle

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