GaAs/AlGaAs Superlattice Characterization By Variable Angle Spectroscopic Ellipsometry

Kenneth G. Merkel, Paul G. Snyder, John A. Woollam, Samuel A. Alterovitz

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Variable angle of incidence spectroscopic ellipsometry (VASE) was used to determine the thickness, alloy composition, and growth quality of multilayer samples. These samples contained a single quantum well grown on a GaAs/AlGaAs superlattice. The superlattice layers were modeled as a bulk AlGaAs layer of unknown composition and thickness. A data fitting procedure allowed the variation of five layer thicknesses and two alloy compositions in a regression analysis. Extremely good data fits of the ellipsometric parameters ψ and ∆ were realized in the 1.55 to 3.54 eV spectral range. Computer generations of the ellipsometric parameters were performed, and were compared with experimental results. The e-hh(1), e-lh (1), and e-hh(2) exciton transitions were observed in the VASE data measured at room temperature. VASE has thus provided a nondestructive and highly effective technique for characterizing intricate multilayered structures.

Original languageEnglish (US)
Pages (from-to)105-111
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume946
DOIs
StatePublished - Aug 9 1988

Fingerprint

Spectroscopic Ellipsometry
Superlattices
Spectroscopic ellipsometry
Gallium Arsenide
ellipsometry
aluminum gallium arsenides
Incidence
incidence
Angle
Chemical analysis
Data Fitting
Exciton
Quantum Well
Electron transitions
Regression Analysis
Regression analysis
Excitons
Semiconductor quantum wells
Multilayer
regression analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

GaAs/AlGaAs Superlattice Characterization By Variable Angle Spectroscopic Ellipsometry. / Merkel, Kenneth G.; Snyder, Paul G.; Woollam, John A.; Alterovitz, Samuel A.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 946, 09.08.1988, p. 105-111.

Research output: Contribution to journalArticle

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