Fundamentals and applications of variable angle spectroscopic ellipsometry

John A Woollam, Paul G. Snyder

Research output: Contribution to journalArticle

60 Citations (Scopus)

Abstract

Being able to accurately select the angle of incidence and spectral range for measurements makes ellipsometry a very powerful tool for materials, surface and interface analysis. The technique is fast, totally computer automated and can be performed at atmospheric pressure. It is totally non-invasive and is sensitive to fractions of atom layer thicknesses. We illustrate the power of variable angle spectroscopic ellipsometry with three examples: optical coatings; surface roughness and wetting; electric field effects in semiconductor studies.

Original languageEnglish (US)
Pages (from-to)279-283
Number of pages5
JournalMaterials Science and Engineering B
Volume5
Issue number2
DOIs
StatePublished - Jan 1 1990

Fingerprint

Electric field effects
Optical coatings
Spectroscopic ellipsometry
Ellipsometry
Atmospheric pressure
ellipsometry
Wetting
Surface roughness
Semiconductor materials
Atoms
optical coatings
wetting
atmospheric pressure
surface roughness
incidence
electric fields
atoms

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Fundamentals and applications of variable angle spectroscopic ellipsometry. / Woollam, John A; Snyder, Paul G.

In: Materials Science and Engineering B, Vol. 5, No. 2, 01.01.1990, p. 279-283.

Research output: Contribution to journalArticle

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