Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses

Xueliang Yan, Jie Hu, Xiaowei Li, Bo Xia, Pengjun Liu, Yongfeng Lu, Lan Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With ultrashort pulse durations and ultrahigh power densities, femtosecond laser presents unique advantages of high precision and high quality fabrication of microchannels in transparent materials. In our study, by shaping femtosecond laser pulse energy distribution in temporal or spatial domains, localized transient electrons dynamics and the subsequent processes, such as phase changes, can be controlled, leading to the dramatic increases in the capability of femtosecond laser microchannels fabrication. The temporally shaped femtosecond laser pulse trains can significantly enhance the material removal rate in both water-assisted femtosecond laser drilling and femtosecond laser irradiation followed by chemical etching. Besides, high-aspect-ratio and small-diameter microchannels are drilled by spatially shaped femtosecond laser pulses.

Original languageEnglish (US)
Title of host publicationHigh-Power Lasers and Applications VII
EditorsRobert F. Walter, Ruxin Li, Upendra N. Singh
PublisherSPIE
ISBN (Electronic)9781628413397
DOIs
StatePublished - Jan 1 2014
EventHigh-Power Lasers and Applications VII - Beijing, China
Duration: Oct 9 2014Oct 11 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9266
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceHigh-Power Lasers and Applications VII
CountryChina
CityBeijing
Period10/9/1410/11/14

Fingerprint

dynamic control
Femtosecond Laser
Microchannel
Dynamic Control
microchannels
Microchannels
Ultrashort pulses
Femtosecond Laser Pulses
Laser pulses
Fabrication
Electron
fabrication
Electrons
pulses
lasers
electrons
Ultrashort Pulse
Energy Distribution
Phase Change
Drilling

Keywords

  • Femtosecond laser
  • electrons dynamics control
  • microchannels fabrication
  • pulse shaping

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Yan, X., Hu, J., Li, X., Xia, B., Liu, P., Lu, Y., & Jiang, L. (2014). Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses. In R. F. Walter, R. Li, & U. N. Singh (Eds.), High-Power Lasers and Applications VII [92660T] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9266). SPIE. https://doi.org/10.1117/12.2071591

Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses. / Yan, Xueliang; Hu, Jie; Li, Xiaowei; Xia, Bo; Liu, Pengjun; Lu, Yongfeng; Jiang, Lan.

High-Power Lasers and Applications VII. ed. / Robert F. Walter; Ruxin Li; Upendra N. Singh. SPIE, 2014. 92660T (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9266).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yan, X, Hu, J, Li, X, Xia, B, Liu, P, Lu, Y & Jiang, L 2014, Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses. in RF Walter, R Li & UN Singh (eds), High-Power Lasers and Applications VII., 92660T, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9266, SPIE, High-Power Lasers and Applications VII, Beijing, China, 10/9/14. https://doi.org/10.1117/12.2071591
Yan X, Hu J, Li X, Xia B, Liu P, Lu Y et al. Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses. In Walter RF, Li R, Singh UN, editors, High-Power Lasers and Applications VII. SPIE. 2014. 92660T. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2071591
Yan, Xueliang ; Hu, Jie ; Li, Xiaowei ; Xia, Bo ; Liu, Pengjun ; Lu, Yongfeng ; Jiang, Lan. / Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses. High-Power Lasers and Applications VII. editor / Robert F. Walter ; Ruxin Li ; Upendra N. Singh. SPIE, 2014. (Proceedings of SPIE - The International Society for Optical Engineering).
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