Femtosecond laser induced tunable surface transformations on (111) Si aided by square grids diffraction

Weina Han, Lan Jiang, Xiaowei Li, Yang Liu, Yongfeng Lu

3 Scopus citations

Abstract

We report an extra freedom to modulate the femtosecond laser energy distribution to control the surface ablated structures through a copper-grid mask. Due to the reduced deposited pulse energy by changing the scanning speed or the pulse fluence, a sequential evolution of three distinctly different surface patterns with periodic distributions is formed, namely, striped ripple lines, ripple microdots, and surface modification. By changing the scanning speed, the number of the multiple dots in a lattice can be modulated. Moreover, by exploring the ablation process through the copper grid mask, it shows an abnormal enhanced ablation effect with strong dependence of the diffraction-aided fs laser ablated surface structures on polarization direction. The sensitivity shows a quasi-cosinusoid-function with a periodicity of π/2. Particularly, the connection process of striped ripple lines manifests a preferential formation direction with the laser polarization.

Original languageEnglish (US)
Article number251601
JournalApplied Physics Letters
Volume107
Issue number25
DOIs
Publication statusPublished - Dec 21 2015

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Femtosecond laser induced tunable surface transformations on (111) Si aided by square grids diffraction. / Han, Weina; Jiang, Lan; Li, Xiaowei; Liu, Yang; Lu, Yongfeng.

In: Applied Physics Letters, Vol. 107, No. 25, 251601, 21.12.2015.

Research output: Contribution to journalArticle