Femtosecond laser high-efficiency drilling of high-aspect-ratio microholes based on free-electron-density adjustments

Lan Jiang, Juqiang Fang, Qiang Cao, Kaihu Zhang, Peng Wang, Yanwu Yu, Qiang Huang, Yongfeng Lu

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We studied the micromachining of high-aspect-ratio holes in poly(methylmethacrylate) using a visible double-pulse femtosecond laser based on free-electron-density adjustments. Hole depth and aspect ratio increased simultaneously upon decreasing the wavelength in the visible-light zone. When the pulse energy reached a high level, the free-electron density was adjusted by using a double-pulse laser, which induced fewer free electrons, a lower reflectivity plasma plume, and more pulse energy deposition in the solid bottom. Thus, the aspect ratio of the hole was improved considerably. At a moderate pulse energy level, a 1.3-1.4 times enhancement of both the ablation depth and the aspect ratio was observed when the double-pulse delay was set between 100 and 300 fs, probably due to an enhanced photon-electron coupling effect through adjusting the free-electron density. At a lower pulse energy level, this effect also induced the generation of a submicrometer string. In addition, the ablation rate was improved significantly by using visible double pulses.

Original languageEnglish (US)
Pages (from-to)7290-7295
Number of pages6
JournalApplied optics
Volume53
Issue number31
DOIs
StatePublished - Nov 1 2014

Fingerprint

high aspect ratio
Ultrashort pulses
drilling
free electrons
Carrier concentration
Aspect ratio
Drilling
Lasers
adjusting
Electrons
Ablation
pulses
Electron energy levels
lasers
aspect ratio
Methylmethacrylate
Microtechnology
Micromachining
ablation
Laser pulses

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Femtosecond laser high-efficiency drilling of high-aspect-ratio microholes based on free-electron-density adjustments. / Jiang, Lan; Fang, Juqiang; Cao, Qiang; Zhang, Kaihu; Wang, Peng; Yu, Yanwu; Huang, Qiang; Lu, Yongfeng.

In: Applied optics, Vol. 53, No. 31, 01.11.2014, p. 7290-7295.

Research output: Contribution to journalArticle

Jiang, Lan ; Fang, Juqiang ; Cao, Qiang ; Zhang, Kaihu ; Wang, Peng ; Yu, Yanwu ; Huang, Qiang ; Lu, Yongfeng. / Femtosecond laser high-efficiency drilling of high-aspect-ratio microholes based on free-electron-density adjustments. In: Applied optics. 2014 ; Vol. 53, No. 31. pp. 7290-7295.
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