Femtosecond laser direct writing in transparent materials based on nonlinear absorption

Li Jia Jiang, Shoji Maruo, Roberto Osellame, Wei Xiong, John H. Campbell, Yongfeng Lu

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) micro/nanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material micro/nanofabrication using FsLDW has seen several developments in materials and applications. Specifically, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D micro/nanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.

Original languageEnglish (US)
Pages (from-to)975-983
Number of pages9
JournalMRS Bulletin
Volume41
Issue number12
DOIs
StatePublished - Dec 1 2016

Fingerprint

transparence
Ultrashort pulses
lasers
multiphoton absorption
Nanotechnology
nanofabrication
Polymers
Fabrication
Glass
Ablation
fabrication
Microfluidics
glass
polymers
MEMS
Nanostructures
Refractive index
Photons
ablation
microelectromechanical systems

Keywords

  • ablation
  • laser
  • microstructure
  • polymerization

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this

Femtosecond laser direct writing in transparent materials based on nonlinear absorption. / Jiang, Li Jia; Maruo, Shoji; Osellame, Roberto; Xiong, Wei; Campbell, John H.; Lu, Yongfeng.

In: MRS Bulletin, Vol. 41, No. 12, 01.12.2016, p. 975-983.

Research output: Contribution to journalArticle

Jiang, LJ, Maruo, S, Osellame, R, Xiong, W, Campbell, JH & Lu, Y 2016, 'Femtosecond laser direct writing in transparent materials based on nonlinear absorption', MRS Bulletin, vol. 41, no. 12, pp. 975-983. https://doi.org/10.1557/mrs.2016.272
Jiang, Li Jia ; Maruo, Shoji ; Osellame, Roberto ; Xiong, Wei ; Campbell, John H. ; Lu, Yongfeng. / Femtosecond laser direct writing in transparent materials based on nonlinear absorption. In: MRS Bulletin. 2016 ; Vol. 41, No. 12. pp. 975-983.
@article{6b994f00c5da4c1891be8527ee5edb46,
title = "Femtosecond laser direct writing in transparent materials based on nonlinear absorption",
abstract = "Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) micro/nanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material micro/nanofabrication using FsLDW has seen several developments in materials and applications. Specifically, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D micro/nanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.",
keywords = "ablation, laser, microstructure, polymerization",
author = "Jiang, {Li Jia} and Shoji Maruo and Roberto Osellame and Wei Xiong and Campbell, {John H.} and Yongfeng Lu",
year = "2016",
month = "12",
day = "1",
doi = "10.1557/mrs.2016.272",
language = "English (US)",
volume = "41",
pages = "975--983",
journal = "MRS Bulletin",
issn = "0883-7694",
publisher = "Materials Research Society",
number = "12",

}

TY - JOUR

T1 - Femtosecond laser direct writing in transparent materials based on nonlinear absorption

AU - Jiang, Li Jia

AU - Maruo, Shoji

AU - Osellame, Roberto

AU - Xiong, Wei

AU - Campbell, John H.

AU - Lu, Yongfeng

PY - 2016/12/1

Y1 - 2016/12/1

N2 - Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) micro/nanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material micro/nanofabrication using FsLDW has seen several developments in materials and applications. Specifically, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D micro/nanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.

AB - Femtosecond laser direct writing (FsLDW) in transparent materials is a laser-based precise three-dimensional (3D) micro/nanofabrication method that has shown great potential for applications. The advantages of FsLDW originate in the nonlinear nature of absorption in the multiphoton absorption process. Over the past few years, transparent material micro/nanofabrication using FsLDW has seen several developments in materials and applications. Specifically, two-photon polymerization has been widely used as a precision direct-writing process for fabrication of polymeric 3D micro/nanostructures; internal/surface ablation of polymer 3D structures based on multiphoton absorption has been demonstrated and developed as a promising subtractive manufacturing technique; and femtosecond laser multiphoton modification in glass has been intensively studied for refractive-index change and generation of nanogratings and microvoids. This article describes the latest research on FsLDW in polymers and glasses with specific applications for large-dimension fabrication, microelectromechanical systems, microphotonics, and microfluidics.

KW - ablation

KW - laser

KW - microstructure

KW - polymerization

UR - http://www.scopus.com/inward/record.url?scp=85003691634&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85003691634&partnerID=8YFLogxK

U2 - 10.1557/mrs.2016.272

DO - 10.1557/mrs.2016.272

M3 - Article

VL - 41

SP - 975

EP - 983

JO - MRS Bulletin

JF - MRS Bulletin

SN - 0883-7694

IS - 12

ER -