Femtosecond laser ablation of copper

Yeow Whatt Goh, Yong Feng Lu, Ming Hui Hong, Tow Chong Chong

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

In recent years, femtosecond (fs) laser ablation has attracted much interest in both basic and applied physics, mainly because of its potential application in micromachining and pulsed laser deposition. Ultrashort laser ablation have the capability to ablate materials precisely with little or no collateral damage, even with materials that are impervious to laser energy from conventional pulsed lasers. The extreme intensities and short timescale at which ultrashort pulsed lasers operate differentiate them from other lasers such as nanosecond laser. In this work, we investigate the expansion dynamics of Cu (copper) plasma generated by ultrashort laser ablation of pure copper targets by optically examining the plasma plume. Time-integrated optical emission spectroscopy measurements by using intensified charged coupled detector array (ICCD) imaging were used to detect the species present in the plasma and to study the laser-generated plasma formation and evolution. Temporal emission profiles are measured. Our interest in the dynamics of laser-generated copper plasma arises from the fact that copper has been considered as a substitute for Aluminium (Al) interconnects/metallization in ULSI devices (for future technology). It is important to know the composition and behavior of copper plasma species for the understanding of the mechanisms involved and optimizing the micro-machining processes and deposition conditions.

Original languageEnglish (US)
Pages (from-to)442-446
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4830
DOIs
StatePublished - Dec 1 2002
EventThird International Symposium on Laser Precision Microfabrication - Osaka, Japan
Duration: May 27 2002May 31 2002

Fingerprint

Laser Ablation
Femtosecond Laser
Laser ablation
Ultrashort pulses
Copper
laser ablation
Plasma
Plasmas
copper
Laser
Lasers
Micromachining
Pulsed Laser
lasers
Pulsed lasers
ultrashort pulsed lasers
Pulsed Laser Deposition
Optical emission spectroscopy
laser machining
optical emission spectroscopy

Keywords

  • Copper
  • Emission Spectra
  • OMA
  • SEM
  • Ultrashort Pulse Laser Ablation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Femtosecond laser ablation of copper. / Goh, Yeow Whatt; Lu, Yong Feng; Hong, Ming Hui; Chong, Tow Chong.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4830, 01.12.2002, p. 442-446.

Research output: Contribution to journalConference article

Goh, Yeow Whatt ; Lu, Yong Feng ; Hong, Ming Hui ; Chong, Tow Chong. / Femtosecond laser ablation of copper. In: Proceedings of SPIE - The International Society for Optical Engineering. 2002 ; Vol. 4830. pp. 442-446.
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