Fabrication of pillar-structured thermal neutron detectors

Rebecca J. Nikolić, Adam M. Conway, Catherine E. Reinhardt, Robert T. Graff, Tzu Fang Wang, Nirmalendu Deo, Chin Li Cheung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

23 Scopus citations

Abstract

Pillar detector is an innovative solid state device structure that leverages advanced semiconductor fabrication technology to produce a device for thermal neutron detection. State-of-the-art thermal neutron detectors have shortcomings in achieving simultaneously high efficiency, low operating voltage while maintaining adequate fieldability performance. By using a 3-dimensional silicon PIN diode pillar array filled with isotopic boron 10, (10B) a high efficiency device is theoretically possible. The fabricated pillar structures reported in this work are composed of 2 μm diameter silicon pillars with a 4 μm pitch and pillar heights of 6 and 12 μm. The pillar detector with a 12 μm height achieved a thermal neutron detection efficiency of 7.3% at 2V.

Original languageEnglish (US)
Title of host publication2007 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS-MIC
Pages1577-1580
Number of pages4
DOIs
Publication statusPublished - Dec 1 2007
Event2007 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS-MIC - Honolulu, HI, United States
Duration: Oct 27 2007Nov 3 2007

Publication series

NameIEEE Nuclear Science Symposium Conference Record
Volume2
ISSN (Print)1095-7863

Conference

Conference2007 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS-MIC
CountryUnited States
CityHonolulu, HI
Period10/27/0711/3/07

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ASJC Scopus subject areas

  • Radiation
  • Nuclear and High Energy Physics
  • Radiology Nuclear Medicine and imaging

Cite this

Nikolić, R. J., Conway, A. M., Reinhardt, C. E., Graff, R. T., Wang, T. F., Deo, N., & Cheung, C. L. (2007). Fabrication of pillar-structured thermal neutron detectors. In 2007 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS-MIC (pp. 1577-1580). [4437299] (IEEE Nuclear Science Symposium Conference Record; Vol. 2). https://doi.org/10.1109/NSSMIC.2007.4437299