Fabrication of multi-layered inverse opals using laser-assisted imprinting

K. K. Mendu, J. Shi, Yongfeng Lu, L. P. Li, N. Batta, D. W. Doerr, Dennis R Alexander

Research output: Contribution to journalReview article

1 Citation (Scopus)

Abstract

Multi-layered inverse opals were fabricated by laser-assisted imprinting of self-assembled silica particles into silicon substrates. A single pulse (pulse duration 23 ns) of a KrF excimer laser instantaneously melts the silicon substrate, which infiltrates and solidifies over the assembled silica particles on the substrate. By removing silica particles embedded in the silicon surface using hydrofluoric acid, inverse-opal photonic crystals were fabricated. This technique is potentially capable of controlling the photonic crystal properties by flexibly varying the silica particle size and the substrate material.

Original languageEnglish (US)
Pages (from-to)1965-1968
Number of pages4
JournalNanotechnology
Volume16
Issue number9
DOIs
StatePublished - Sep 1 2005

Fingerprint

Silicon Dioxide
Silicon
Silica
silicon dioxide
Fabrication
fabrication
Lasers
Substrates
Photonic crystals
lasers
silicon
photonics
Hydrofluoric Acid
Hydrofluoric acid
hydrofluoric acid
Excimer lasers
excimer lasers
crystals
Laser pulses
pulse duration

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Fabrication of multi-layered inverse opals using laser-assisted imprinting. / Mendu, K. K.; Shi, J.; Lu, Yongfeng; Li, L. P.; Batta, N.; Doerr, D. W.; Alexander, Dennis R.

In: Nanotechnology, Vol. 16, No. 9, 01.09.2005, p. 1965-1968.

Research output: Contribution to journalReview article

Mendu, K. K. ; Shi, J. ; Lu, Yongfeng ; Li, L. P. ; Batta, N. ; Doerr, D. W. ; Alexander, Dennis R. / Fabrication of multi-layered inverse opals using laser-assisted imprinting. In: Nanotechnology. 2005 ; Vol. 16, No. 9. pp. 1965-1968.
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