Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting

L. P. Li, Yongfeng Lu, J. Shi, D. W. Doerr, Dennis R Alexander, K. G. Zhu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have developed a new method of laser-assisted nanoimprinting to fabricate hemispherical-cavity arrays on silicon (Si) and germanium (Ge) substrates. A monolayer of silica particles, with different diameters ranging from 0.30 to 5 μm, was deposited on a Si or Ge substrate by self-assembly technique. A quartz plate was tightly placed on the sample surface to form a quartz/nanoparticle/substrate structure. The silica particles were imprinted into Si or Ge substrates after laser irradiation (KrF excimer laser, λ=248 nm) on the structure with a single pulse. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were used to remove the silica particles on the substrate surface. Hemispherical cavities were formed on the substrate surface. The influences of different particle size and laser fluence on the structuring of the surface have been investigated. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) were performed to observe the dimensions of the cavities. One-dimensional thermal calculation was employed to understand the thermal effects in this process.

Original languageEnglish (US)
Title of host publicationICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
StatePublished - Dec 1 2003
EventICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics - Jacksonville, FL, United States
Duration: Oct 13 2003Oct 16 2003

Publication series

NameICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CityJacksonville, FL
Period10/13/0310/16/03

Fingerprint

Silicon
silicon
cavity
laser
Germanium
Fabrication
substrate
germanium
Lasers
Substrates
Silicon Dioxide
Quartz
silica
Silica
Ultrasonic cleaning
quartz
Hydrofluoric Acid
hydrofluoric acid
Hydrofluoric acid
atomic force microscopy

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Li, L. P., Lu, Y., Shi, J., Doerr, D. W., Alexander, D. R., & Zhu, K. G. (2003). Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting. In ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings [M105] (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting. / Li, L. P.; Lu, Yongfeng; Shi, J.; Doerr, D. W.; Alexander, Dennis R; Zhu, K. G.

ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2003. M105 (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Li, LP, Lu, Y, Shi, J, Doerr, DW, Alexander, DR & Zhu, KG 2003, Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting. in ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings., M105, ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings, ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Jacksonville, FL, United States, 10/13/03.
Li LP, Lu Y, Shi J, Doerr DW, Alexander DR, Zhu KG. Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting. In ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2003. M105. (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
Li, L. P. ; Lu, Yongfeng ; Shi, J. ; Doerr, D. W. ; Alexander, Dennis R ; Zhu, K. G. / Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting. ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2003. (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
@inproceedings{e9915801b14540a88fc8d4ab47fdbe71,
title = "Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting",
abstract = "We have developed a new method of laser-assisted nanoimprinting to fabricate hemispherical-cavity arrays on silicon (Si) and germanium (Ge) substrates. A monolayer of silica particles, with different diameters ranging from 0.30 to 5 μm, was deposited on a Si or Ge substrate by self-assembly technique. A quartz plate was tightly placed on the sample surface to form a quartz/nanoparticle/substrate structure. The silica particles were imprinted into Si or Ge substrates after laser irradiation (KrF excimer laser, λ=248 nm) on the structure with a single pulse. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were used to remove the silica particles on the substrate surface. Hemispherical cavities were formed on the substrate surface. The influences of different particle size and laser fluence on the structuring of the surface have been investigated. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) were performed to observe the dimensions of the cavities. One-dimensional thermal calculation was employed to understand the thermal effects in this process.",
author = "Li, {L. P.} and Yongfeng Lu and J. Shi and Doerr, {D. W.} and Alexander, {Dennis R} and Zhu, {K. G.}",
year = "2003",
month = "12",
day = "1",
language = "English (US)",
isbn = "0912035757",
series = "ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",
booktitle = "ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",

}

TY - GEN

T1 - Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting

AU - Li, L. P.

AU - Lu, Yongfeng

AU - Shi, J.

AU - Doerr, D. W.

AU - Alexander, Dennis R

AU - Zhu, K. G.

PY - 2003/12/1

Y1 - 2003/12/1

N2 - We have developed a new method of laser-assisted nanoimprinting to fabricate hemispherical-cavity arrays on silicon (Si) and germanium (Ge) substrates. A monolayer of silica particles, with different diameters ranging from 0.30 to 5 μm, was deposited on a Si or Ge substrate by self-assembly technique. A quartz plate was tightly placed on the sample surface to form a quartz/nanoparticle/substrate structure. The silica particles were imprinted into Si or Ge substrates after laser irradiation (KrF excimer laser, λ=248 nm) on the structure with a single pulse. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were used to remove the silica particles on the substrate surface. Hemispherical cavities were formed on the substrate surface. The influences of different particle size and laser fluence on the structuring of the surface have been investigated. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) were performed to observe the dimensions of the cavities. One-dimensional thermal calculation was employed to understand the thermal effects in this process.

AB - We have developed a new method of laser-assisted nanoimprinting to fabricate hemispherical-cavity arrays on silicon (Si) and germanium (Ge) substrates. A monolayer of silica particles, with different diameters ranging from 0.30 to 5 μm, was deposited on a Si or Ge substrate by self-assembly technique. A quartz plate was tightly placed on the sample surface to form a quartz/nanoparticle/substrate structure. The silica particles were imprinted into Si or Ge substrates after laser irradiation (KrF excimer laser, λ=248 nm) on the structure with a single pulse. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were used to remove the silica particles on the substrate surface. Hemispherical cavities were formed on the substrate surface. The influences of different particle size and laser fluence on the structuring of the surface have been investigated. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) were performed to observe the dimensions of the cavities. One-dimensional thermal calculation was employed to understand the thermal effects in this process.

UR - http://www.scopus.com/inward/record.url?scp=57349167717&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=57349167717&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0912035757

SN - 9780912035758

T3 - ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

BT - ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

ER -