Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting

K. K. Mendu, Y. F. Lu, L. P. Li, D. W. Doerr, D. R. Alexander

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new approach to fabricate 3-D photonic bandgap structures on silicon substrates using colloidal crystals and laser-assisted nanoimprinting is presented. Self assembly was used to deposit two layers of silica micro particles with a diameter of 0.97 μm. A KrF excimer laser beam with a wavelength of 248 nm was vertically irradiated on the quartz plate placed on the silicon substrate containing two layers of silica particles. The silica particles were imprinted into silicon substrate by the quartz plate during the laser pulse irradiation. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were then used to remove the silica particles. 3-D hemispherical cavities were formed on the silicon substrate surface.

Original languageEnglish (US)
Title of host publicationICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
StatePublished - Dec 1 2004
EventICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics - San Francisco, CA, United States
Duration: Oct 4 2004Oct 7 2004

Publication series

NameICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CitySan Francisco, CA
Period10/4/0410/7/04

Fingerprint

Silicon
Silicon Dioxide
Photonics
silicon
Energy gap
silica
laser
Silica
Fabrication
substrate
Quartz
Lasers
Substrates
Ultrasonic cleaning
quartz
Hydrofluoric Acid
hydrofluoric acid
Hydrofluoric acid
Excimer lasers
Self assembly

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Mendu, K. K., Lu, Y. F., Li, L. P., Doerr, D. W., & Alexander, D. R. (2004). Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting. / Mendu, K. K.; Lu, Y. F.; Li, L. P.; Doerr, D. W.; Alexander, D. R.

ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mendu, KK, Lu, YF, Li, LP, Doerr, DW & Alexander, DR 2004, Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting. in ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings, ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, San Francisco, CA, United States, 10/4/04.
Mendu KK, Lu YF, Li LP, Doerr DW, Alexander DR. Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
Mendu, K. K. ; Lu, Y. F. ; Li, L. P. ; Doerr, D. W. ; Alexander, D. R. / Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting. ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
@inproceedings{97f9940260eb4fa3997380cb19c5e56e,
title = "Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting",
abstract = "A new approach to fabricate 3-D photonic bandgap structures on silicon substrates using colloidal crystals and laser-assisted nanoimprinting is presented. Self assembly was used to deposit two layers of silica micro particles with a diameter of 0.97 μm. A KrF excimer laser beam with a wavelength of 248 nm was vertically irradiated on the quartz plate placed on the silicon substrate containing two layers of silica particles. The silica particles were imprinted into silicon substrate by the quartz plate during the laser pulse irradiation. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were then used to remove the silica particles. 3-D hemispherical cavities were formed on the silicon substrate surface.",
author = "Mendu, {K. K.} and Lu, {Y. F.} and Li, {L. P.} and Doerr, {D. W.} and Alexander, {D. R.}",
year = "2004",
month = "12",
day = "1",
language = "English (US)",
isbn = "0912035773",
series = "ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",
booktitle = "ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",

}

TY - GEN

T1 - Fabrication of 3-D photonic bandgap structures on silicon using laser assisted-nanoimprinting

AU - Mendu, K. K.

AU - Lu, Y. F.

AU - Li, L. P.

AU - Doerr, D. W.

AU - Alexander, D. R.

PY - 2004/12/1

Y1 - 2004/12/1

N2 - A new approach to fabricate 3-D photonic bandgap structures on silicon substrates using colloidal crystals and laser-assisted nanoimprinting is presented. Self assembly was used to deposit two layers of silica micro particles with a diameter of 0.97 μm. A KrF excimer laser beam with a wavelength of 248 nm was vertically irradiated on the quartz plate placed on the silicon substrate containing two layers of silica particles. The silica particles were imprinted into silicon substrate by the quartz plate during the laser pulse irradiation. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were then used to remove the silica particles. 3-D hemispherical cavities were formed on the silicon substrate surface.

AB - A new approach to fabricate 3-D photonic bandgap structures on silicon substrates using colloidal crystals and laser-assisted nanoimprinting is presented. Self assembly was used to deposit two layers of silica micro particles with a diameter of 0.97 μm. A KrF excimer laser beam with a wavelength of 248 nm was vertically irradiated on the quartz plate placed on the silicon substrate containing two layers of silica particles. The silica particles were imprinted into silicon substrate by the quartz plate during the laser pulse irradiation. Ultrasonic cleaning and hydrofluoric-acid (HF) solution were then used to remove the silica particles. 3-D hemispherical cavities were formed on the silicon substrate surface.

UR - http://www.scopus.com/inward/record.url?scp=56749100706&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=56749100706&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:56749100706

SN - 0912035773

SN - 9780912035772

T3 - ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

BT - ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

ER -