Fabrication of 2-D and 3-D photonic bandgap structures using laser-assisted imprinting of self-assembled particles

Y. F. Lu, L. P. Li, K. K. Mendu, J. Shi, D. W. Doerr, D. R. Alexander

Research output: Contribution to journalConference article

Abstract

Fabrication of 2-D and 3-D photonic bandgap (PBG) structures on silicon substrates using laser-assisted nanoimprinting of silica particles has been investigated. Monolayers of silica particles, with different diameters ranging from 160 nm to 5 μm, were deposited on silicon substrates by self-assembly. A quartz plate, which is transparent to the laser wavelength of 248 nm, was tightly placed on the substrate surface. A KrF excimer laser beam with the wavelength of 248 nm was vertically irradiated on the quartz/nanoparticle/ silicon structure. The silica particles were imprinted into silicon substrates by the quartz to form a 2-D PBG structure due to the transient Si surface melting during the laser pulse. 3-D PBG structures can be fabricated by directly imprinting multilayer self-assembled silica particles into Si substrates. They can also be fabricated by repeating a process cycle of silica nanoparticles self-assembly, amorphous Si layer deposition, and simultaneous laser melting, imprinting and recrystallization.

Original languageEnglish (US)
Article numberR2.5
Pages (from-to)277-288
Number of pages12
JournalMaterials Research Society Symposium Proceedings
Volume820
StatePublished - Dec 1 2004
EventNanoengineered Assemblies and Advanced Micro/Nanosystems - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

Fingerprint

Silicon Dioxide
Photonics
Silicon
Energy gap
Silica
Quartz
photonics
silicon dioxide
Fabrication
fabrication
Lasers
Substrates
quartz
lasers
silicon
Self assembly
self assembly
Melting
melting
Nanoparticles

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Fabrication of 2-D and 3-D photonic bandgap structures using laser-assisted imprinting of self-assembled particles. / Lu, Y. F.; Li, L. P.; Mendu, K. K.; Shi, J.; Doerr, D. W.; Alexander, D. R.

In: Materials Research Society Symposium Proceedings, Vol. 820, R2.5, 01.12.2004, p. 277-288.

Research output: Contribution to journalConference article

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AU - Lu, Y. F.

AU - Li, L. P.

AU - Mendu, K. K.

AU - Shi, J.

AU - Doerr, D. W.

AU - Alexander, D. R.

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N2 - Fabrication of 2-D and 3-D photonic bandgap (PBG) structures on silicon substrates using laser-assisted nanoimprinting of silica particles has been investigated. Monolayers of silica particles, with different diameters ranging from 160 nm to 5 μm, were deposited on silicon substrates by self-assembly. A quartz plate, which is transparent to the laser wavelength of 248 nm, was tightly placed on the substrate surface. A KrF excimer laser beam with the wavelength of 248 nm was vertically irradiated on the quartz/nanoparticle/ silicon structure. The silica particles were imprinted into silicon substrates by the quartz to form a 2-D PBG structure due to the transient Si surface melting during the laser pulse. 3-D PBG structures can be fabricated by directly imprinting multilayer self-assembled silica particles into Si substrates. They can also be fabricated by repeating a process cycle of silica nanoparticles self-assembly, amorphous Si layer deposition, and simultaneous laser melting, imprinting and recrystallization.

AB - Fabrication of 2-D and 3-D photonic bandgap (PBG) structures on silicon substrates using laser-assisted nanoimprinting of silica particles has been investigated. Monolayers of silica particles, with different diameters ranging from 160 nm to 5 μm, were deposited on silicon substrates by self-assembly. A quartz plate, which is transparent to the laser wavelength of 248 nm, was tightly placed on the substrate surface. A KrF excimer laser beam with the wavelength of 248 nm was vertically irradiated on the quartz/nanoparticle/ silicon structure. The silica particles were imprinted into silicon substrates by the quartz to form a 2-D PBG structure due to the transient Si surface melting during the laser pulse. 3-D PBG structures can be fabricated by directly imprinting multilayer self-assembled silica particles into Si substrates. They can also be fabricated by repeating a process cycle of silica nanoparticles self-assembly, amorphous Si layer deposition, and simultaneous laser melting, imprinting and recrystallization.

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