Fabrication, characterization and simulation of large-scale 3-D photonic crystals using laser-assisted fabrication techniques

H. Wang, Y. F. Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

3-D photonic bandgap (PBG) structures were fabricated by laser-assisted fabrication techniques, including laser-assisted nanoimprinting and laserassisted chemical vapor deposition (LCVD), based on the self-assembled silica colloidal crystals. The multilayer silica colloidal crystals self-assembled on silicon substrates were formed with isothermal heating evaporation-induced self-assembly. To infiltrate the silica colloidal crystals, the laser-assisted imprinting technique was used using a short pulse (pulse duration 23 ns) of a KrF excimer laser. The nanosecond laser pulse instantaneously melted the silicon substrates, which infiltrated and solidified over the assembled silica particles on the substrates. By removing silica particles embedded in the silicon using hydrofluoric acid, inverse opal photonic crystals were produced. To utilize the LCVD technique, a continuous wave (CW) CO2 laser (10.6 μ m wavelength) was used as the energy source. A silica-core-silicon-shell PBG structure was obtained. This technique is capable of fabricating structures with various PBGs by obtaining different silicon shell thickness with different LCVD parameters. A series of PBG structures with designed PBGs were obtained with different experimental conditions. Spectroscopic ellipsometry was used to identify specific PBGs. The plain wave expansion (PWE) simulation was used to simulate the photonic dispersion diagrams of the structures, which agreed with the experimental results.

Original languageEnglish (US)
Title of host publication3rd Pacific International Conference on Applications of Lasers and Optics, PICALO 2008 - Conference Proceedings
PublisherLaser Institute of America
Pages772-777
Number of pages6
ISBN (Print)9780912035895
Publication statusPublished - Jan 1 2008
Event3rd Pacific International Conference on Applications of Lasers and Optics, PICALO 2008 - Beijing, China
Duration: Apr 16 2008Apr 18 2008

Publication series

Name3rd Pacific International Conference on Applications of Lasers and Optics, PICALO 2008 - Conference Proceedings

Other

Other3rd Pacific International Conference on Applications of Lasers and Optics, PICALO 2008
CountryChina
CityBeijing
Period4/16/084/18/08

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Wang, H., & Lu, Y. F. (2008). Fabrication, characterization and simulation of large-scale 3-D photonic crystals using laser-assisted fabrication techniques. In 3rd Pacific International Conference on Applications of Lasers and Optics, PICALO 2008 - Conference Proceedings (pp. 772-777). (3rd Pacific International Conference on Applications of Lasers and Optics, PICALO 2008 - Conference Proceedings). Laser Institute of America.