Fabrication, characterization and simulation of 3-D inverse-opal photonic crystals using laser-assisted imprinting

H. Wang, Yongfeng Lu, Z. Y. Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Three-dimensional (3-D) photonic crystals were fabricated by laser-assisted imprinting of self-assembled silica particles into silicon substrates. The multilayer self-assembly of silica particles were formed on the silicon substrates using isothermal heating evaporation approach. A KrF excimer laser pulse with a wavelength of 248 nm and a duration of 23 ns was used to melt the silicon substrate surface, which infiltrated and solidified over the assembled silica particles. By removing the silica particles embedded in the silicon using hydrofluoric (HF) acid, inverse-opal photonic crystals were fabricated This technique is capable of fabricating structures with complete photonic bandgaps (PBG), and engineering the photonic bandgaps by flexibly varying the silica particle size.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
StatePublished - May 1 2006
EventLaser-based Micropackaging - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6107
ISSN (Print)0277-786X

Conference

ConferenceLaser-based Micropackaging
CountryUnited States
CitySan Jose, CA
Period1/25/061/26/06

Fingerprint

Photonic crystals
Silica
photonics
silicon dioxide
Fabrication
fabrication
Lasers
Silicon
crystals
lasers
silicon
simulation
Photonics
Energy gap
Substrates
Hydrofluoric acid
hydrofluoric acid
Excimer lasers
excimer lasers
Self assembly

Keywords

  • Laser-assisted imprinting
  • PBG
  • Self-assembly

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Wang, H., Lu, Y., & Yang, Z. Y. (2006). Fabrication, characterization and simulation of 3-D inverse-opal photonic crystals using laser-assisted imprinting. In Proceedings of SPIE - The International Society for Optical Engineering [61070E] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6107). https://doi.org/10.1117/12.644976

Fabrication, characterization and simulation of 3-D inverse-opal photonic crystals using laser-assisted imprinting. / Wang, H.; Lu, Yongfeng; Yang, Z. Y.

Proceedings of SPIE - The International Society for Optical Engineering. 2006. 61070E (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6107).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wang, H, Lu, Y & Yang, ZY 2006, Fabrication, characterization and simulation of 3-D inverse-opal photonic crystals using laser-assisted imprinting. in Proceedings of SPIE - The International Society for Optical Engineering., 61070E, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6107, Laser-based Micropackaging, San Jose, CA, United States, 1/25/06. https://doi.org/10.1117/12.644976
Wang H, Lu Y, Yang ZY. Fabrication, characterization and simulation of 3-D inverse-opal photonic crystals using laser-assisted imprinting. In Proceedings of SPIE - The International Society for Optical Engineering. 2006. 61070E. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.644976
Wang, H. ; Lu, Yongfeng ; Yang, Z. Y. / Fabrication, characterization and simulation of 3-D inverse-opal photonic crystals using laser-assisted imprinting. Proceedings of SPIE - The International Society for Optical Engineering. 2006. (Proceedings of SPIE - The International Society for Optical Engineering).
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