Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser

Teng Soon Wee, Yong Feng Lu, Wai Kin Chim

Research output: Contribution to journalArticle

Abstract

When pulses of a Gaussian laser beam with sufficient energy intensity are applied on to the surface of a moving substrate, interesting surface reliefs can be formed at the spots where the beam strikes the substrate. In this paper, experimental findings of such laser-induced melt reliefs formed on the surface of a silicon substrate using laser pulses from a CW Ar+ laser are reported. The dependence of the size of the reliefs on parameters such as the power of the laser beam and the speed at which the substrate moves under the laser irradiation are investigated. A numerical finite element routine has also been developed to model the laser melting problem. With the help of the melting model, attempts to deduce the formation of these melt reliefs have been carried out.

Original languageEnglish (US)
Pages (from-to)205-209
Number of pages5
JournalMaterials Chemistry and Physics
Volume54
Issue number1-3
DOIs
StatePublished - Jul 1998

Fingerprint

Silicon
Laser pulses
Lasers
silicon
Substrates
pulses
lasers
Laser beams
Melting
Continuous wave lasers
melting
laser beams
Laser beam effects
irradiation
energy

Keywords

  • Laser induced temperature profile
  • Laser-induced melt relief
  • Numerical laser melting model
  • Pulsed laser melting
  • Silicon

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser. / Wee, Teng Soon; Lu, Yong Feng; Chim, Wai Kin.

In: Materials Chemistry and Physics, Vol. 54, No. 1-3, 07.1998, p. 205-209.

Research output: Contribution to journalArticle

@article{ca2df30543b049a2aad6ffd2b953918f,
title = "Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser",
abstract = "When pulses of a Gaussian laser beam with sufficient energy intensity are applied on to the surface of a moving substrate, interesting surface reliefs can be formed at the spots where the beam strikes the substrate. In this paper, experimental findings of such laser-induced melt reliefs formed on the surface of a silicon substrate using laser pulses from a CW Ar+ laser are reported. The dependence of the size of the reliefs on parameters such as the power of the laser beam and the speed at which the substrate moves under the laser irradiation are investigated. A numerical finite element routine has also been developed to model the laser melting problem. With the help of the melting model, attempts to deduce the formation of these melt reliefs have been carried out.",
keywords = "Laser induced temperature profile, Laser-induced melt relief, Numerical laser melting model, Pulsed laser melting, Silicon",
author = "Wee, {Teng Soon} and Lu, {Yong Feng} and Chim, {Wai Kin}",
year = "1998",
month = "7",
doi = "10.1016/S0254-0584(98)00029-7",
language = "English (US)",
volume = "54",
pages = "205--209",
journal = "Materials Chemistry and Physics",
issn = "0254-0584",
publisher = "Elsevier BV",
number = "1-3",

}

TY - JOUR

T1 - Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser

AU - Wee, Teng Soon

AU - Lu, Yong Feng

AU - Chim, Wai Kin

PY - 1998/7

Y1 - 1998/7

N2 - When pulses of a Gaussian laser beam with sufficient energy intensity are applied on to the surface of a moving substrate, interesting surface reliefs can be formed at the spots where the beam strikes the substrate. In this paper, experimental findings of such laser-induced melt reliefs formed on the surface of a silicon substrate using laser pulses from a CW Ar+ laser are reported. The dependence of the size of the reliefs on parameters such as the power of the laser beam and the speed at which the substrate moves under the laser irradiation are investigated. A numerical finite element routine has also been developed to model the laser melting problem. With the help of the melting model, attempts to deduce the formation of these melt reliefs have been carried out.

AB - When pulses of a Gaussian laser beam with sufficient energy intensity are applied on to the surface of a moving substrate, interesting surface reliefs can be formed at the spots where the beam strikes the substrate. In this paper, experimental findings of such laser-induced melt reliefs formed on the surface of a silicon substrate using laser pulses from a CW Ar+ laser are reported. The dependence of the size of the reliefs on parameters such as the power of the laser beam and the speed at which the substrate moves under the laser irradiation are investigated. A numerical finite element routine has also been developed to model the laser melting problem. With the help of the melting model, attempts to deduce the formation of these melt reliefs have been carried out.

KW - Laser induced temperature profile

KW - Laser-induced melt relief

KW - Numerical laser melting model

KW - Pulsed laser melting

KW - Silicon

UR - http://www.scopus.com/inward/record.url?scp=0032120979&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032120979&partnerID=8YFLogxK

U2 - 10.1016/S0254-0584(98)00029-7

DO - 10.1016/S0254-0584(98)00029-7

M3 - Article

AN - SCOPUS:0032120979

VL - 54

SP - 205

EP - 209

JO - Materials Chemistry and Physics

JF - Materials Chemistry and Physics

SN - 0254-0584

IS - 1-3

ER -