Etching of 10boron with SF 6-based electron cyclotron resonance plasmas for pillar-structured thermal neutron detectors

L. F. Voss, C. E. Reinhardt, R. T. Graff, A. M. Conway, R. J. Nikolić, N. Deo, Chin Li "Barry" Cheung

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Isotopically enriched 10boron for use in pillar-structured neutron detectors was successfully etched in an electron cyclotron resonance (ECR) plasma using SF 6-based plasmas. The effects of radio frequency (RF) power, ECR power, gas flow rate, H 2 and O 2 incorporation into the plasma, and gas mixture ratios were examined. Etch rates up to approximately 1.35 μm/min were realized. In addition, etch morphology was examined, and the final shape of 10boron-coated pillars could be controlled through the etch gas mixture utilized. Selectivity to the underlying Si structure was apparent from scanning electron microscopy (SEM) micrographs of completed etches.

Original languageEnglish (US)
Pages (from-to)263-267
Number of pages5
JournalJournal of Electronic Materials
Volume39
Issue number3
DOIs
StatePublished - Mar 1 2010

Fingerprint

Neutron detectors
Electron cyclotron resonance
neutron counters
electron cyclotron resonance
thermal neutrons
Gas mixtures
Etching
etching
Plasma Gases
Plasmas
gas mixtures
Flow of gases
Flow rate
Scanning electron microscopy
gas flow
radio frequencies
flow velocity
selectivity
scanning electron microscopy
Hot Temperature

Keywords

  • Boron
  • Detector
  • Etch
  • Neutron
  • Plasma
  • Radiation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

Etching of 10boron with SF 6-based electron cyclotron resonance plasmas for pillar-structured thermal neutron detectors. / Voss, L. F.; Reinhardt, C. E.; Graff, R. T.; Conway, A. M.; Nikolić, R. J.; Deo, N.; Cheung, Chin Li "Barry".

In: Journal of Electronic Materials, Vol. 39, No. 3, 01.03.2010, p. 263-267.

Research output: Contribution to journalArticle

Voss, L. F. ; Reinhardt, C. E. ; Graff, R. T. ; Conway, A. M. ; Nikolić, R. J. ; Deo, N. ; Cheung, Chin Li "Barry". / Etching of 10boron with SF 6-based electron cyclotron resonance plasmas for pillar-structured thermal neutron detectors. In: Journal of Electronic Materials. 2010 ; Vol. 39, No. 3. pp. 263-267.
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