Ion beam assisted deposition (IBAD) was used to deposit ceramic and metallic films at temperatures below 150°C with nanocrystalline grain size. By combining chromium evaporation with nitrogen beam bombardment, hard, adherent CrN films without any porosity have been produced at low temperatures with a N/Cr arrival ratio of about 1. The grain size is typically smaller than 100angstrom and hardness is typically higher than 25 GPa. Mechanical properties of CrN are greatly influenced by impurities, as well as by surface conditioning of the substrate.
|Original language||English (US)|
|Number of pages||12|
|Journal||Materials Research Society Symposium - Proceedings|
|Publication status||Published - Dec 1 1996|
|Event||Proceedings of the 1996 MRS Fall Meeting - Boston, MA, USA|
Duration: Dec 2 1996 → Dec 6 1996