Ellipsometric study of ZnO/Ag/ZnO optical coatings

Determination of layer thicknesses and optical constants

K. Memarzadeh, John A Woollam, A. Belkind

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Variable angle of incidence spectroscopic ellipsometry was used to study the ZnO/Ag/ZnO (dielectric-metal-dielectric) optical coatings. As a result, the three layer thicknesses, the optical constants of the ZnO layers (3000-8000 W), and the optical constants of the Ag layers (3500-8000 Å) measured on three coated glass samples are reported here. The thickness measurements obtained by ellipsometry agreed with those determined from cross sectional TEM photos well within the error margins of the two techniques. In addition, the spectral dependence of the index of refraction of the silver layers were characterized by oscillations absent in the bulk silver optical data, and likely due to the generation of surface and bulk plasmons.

Original languageEnglish (US)
Pages (from-to)54-63
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume823
DOIs
StatePublished - Nov 12 1987

Fingerprint

Optical Coatings
Optical Constants
Optical coatings
optical coatings
Optical constants
Silver
Plasmons
Thickness measurement
Spectroscopic ellipsometry
Ellipsometry
Refraction
ellipsometry
Metals
silver
Spectroscopic Ellipsometry
Transmission electron microscopy
Glass
plasmons
Margin
refraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

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AB - Variable angle of incidence spectroscopic ellipsometry was used to study the ZnO/Ag/ZnO (dielectric-metal-dielectric) optical coatings. As a result, the three layer thicknesses, the optical constants of the ZnO layers (3000-8000 W), and the optical constants of the Ag layers (3500-8000 Å) measured on three coated glass samples are reported here. The thickness measurements obtained by ellipsometry agreed with those determined from cross sectional TEM photos well within the error margins of the two techniques. In addition, the spectral dependence of the index of refraction of the silver layers were characterized by oscillations absent in the bulk silver optical data, and likely due to the generation of surface and bulk plasmons.

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