Electric signal diagnostics of plasma dynamics at early stage of laser ablation

M. H. Hong, Y. F. Lu, A. Foong

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

Plasma dynamics at early stage of laser ablation is investigated by a tiny metal probe. There are two negative peaks with different distributions in an electric signal. The first peak has a duration about 50 ns and delays 30 ns with respect to laser irradiation. The waveform and peak maximum position do not change with probe distance. It is attributed to plasma-induced electric field at the early stage. The second peak appears about 250 ns later with a profile duration higher than 1 μs. The peak maximum position moves forward as probe distance reduces due to earlier charge particle arrival of the probe. Experimental results and theoretical modeling show that electric signal of plasma-induced electric field is resulted from an electric dipole with negative charge in front. It is constructed by electrons and positive ions emitted at early stage of laser ablation. Dependence of electric signal profile on probe distance, laser fluence and pulse number is studied. The electric signal detection can be used to monitor laser removal of metallic oxide layer in real time. Influence of substrate bias on the signal waveform is also analyzed. It may be applied to modify plasma dynamics and laser ablation.

Original languageEnglish (US)
Pages (from-to)207-216
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3933
StatePublished - Jan 1 2000
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing V - San Jose, CA, USA
Duration: Jan 24 2000Jan 26 2000

Fingerprint

plasma dynamics
Laser Ablation
Laser ablation
laser ablation
Diagnostics
Probe
Plasma
Plasmas
probes
Laser
Waveform
Electric Field
waveforms
Electric fields
Charge
lasers
electric fields
Lasers
Signal Detection
signal detection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Electric signal diagnostics of plasma dynamics at early stage of laser ablation. / Hong, M. H.; Lu, Y. F.; Foong, A.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3933, 01.01.2000, p. 207-216.

Research output: Contribution to journalConference article

@article{3db2b1471fd742ada0b6eeb5139e6a4f,
title = "Electric signal diagnostics of plasma dynamics at early stage of laser ablation",
abstract = "Plasma dynamics at early stage of laser ablation is investigated by a tiny metal probe. There are two negative peaks with different distributions in an electric signal. The first peak has a duration about 50 ns and delays 30 ns with respect to laser irradiation. The waveform and peak maximum position do not change with probe distance. It is attributed to plasma-induced electric field at the early stage. The second peak appears about 250 ns later with a profile duration higher than 1 μs. The peak maximum position moves forward as probe distance reduces due to earlier charge particle arrival of the probe. Experimental results and theoretical modeling show that electric signal of plasma-induced electric field is resulted from an electric dipole with negative charge in front. It is constructed by electrons and positive ions emitted at early stage of laser ablation. Dependence of electric signal profile on probe distance, laser fluence and pulse number is studied. The electric signal detection can be used to monitor laser removal of metallic oxide layer in real time. Influence of substrate bias on the signal waveform is also analyzed. It may be applied to modify plasma dynamics and laser ablation.",
author = "Hong, {M. H.} and Lu, {Y. F.} and A. Foong",
year = "2000",
month = "1",
day = "1",
language = "English (US)",
volume = "3933",
pages = "207--216",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

TY - JOUR

T1 - Electric signal diagnostics of plasma dynamics at early stage of laser ablation

AU - Hong, M. H.

AU - Lu, Y. F.

AU - Foong, A.

PY - 2000/1/1

Y1 - 2000/1/1

N2 - Plasma dynamics at early stage of laser ablation is investigated by a tiny metal probe. There are two negative peaks with different distributions in an electric signal. The first peak has a duration about 50 ns and delays 30 ns with respect to laser irradiation. The waveform and peak maximum position do not change with probe distance. It is attributed to plasma-induced electric field at the early stage. The second peak appears about 250 ns later with a profile duration higher than 1 μs. The peak maximum position moves forward as probe distance reduces due to earlier charge particle arrival of the probe. Experimental results and theoretical modeling show that electric signal of plasma-induced electric field is resulted from an electric dipole with negative charge in front. It is constructed by electrons and positive ions emitted at early stage of laser ablation. Dependence of electric signal profile on probe distance, laser fluence and pulse number is studied. The electric signal detection can be used to monitor laser removal of metallic oxide layer in real time. Influence of substrate bias on the signal waveform is also analyzed. It may be applied to modify plasma dynamics and laser ablation.

AB - Plasma dynamics at early stage of laser ablation is investigated by a tiny metal probe. There are two negative peaks with different distributions in an electric signal. The first peak has a duration about 50 ns and delays 30 ns with respect to laser irradiation. The waveform and peak maximum position do not change with probe distance. It is attributed to plasma-induced electric field at the early stage. The second peak appears about 250 ns later with a profile duration higher than 1 μs. The peak maximum position moves forward as probe distance reduces due to earlier charge particle arrival of the probe. Experimental results and theoretical modeling show that electric signal of plasma-induced electric field is resulted from an electric dipole with negative charge in front. It is constructed by electrons and positive ions emitted at early stage of laser ablation. Dependence of electric signal profile on probe distance, laser fluence and pulse number is studied. The electric signal detection can be used to monitor laser removal of metallic oxide layer in real time. Influence of substrate bias on the signal waveform is also analyzed. It may be applied to modify plasma dynamics and laser ablation.

UR - http://www.scopus.com/inward/record.url?scp=0033707628&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033707628&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033707628

VL - 3933

SP - 207

EP - 216

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -