Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition

Ji Nan Zeng, Juay Kiang Low, Zhong Min Ren, Thomas Liew, Yong Feng Lu

Research output: Contribution to journalConference article

182 Scopus citations


We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy.

Original languageEnglish (US)
Pages (from-to)362-367
Number of pages6
JournalApplied Surface Science
StatePublished - Jan 1 2002
EventCola 2001 - Tsukuba, Japan
Duration: Oct 1 2001Oct 1 2001



  • Pulsed laser deposition
  • Raman spectroscopy
  • Sheet resistivity
  • Transmittance spectra
  • X-ray diffraction
  • Zinc oxide

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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