Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition

Ji Nan Zeng, Juay Kiang Low, Zhong Min Ren, Thomas Liew, Yongfeng Lu

Research output: Contribution to journalConference article

178 Citations (Scopus)

Abstract

We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy.

Original languageEnglish (US)
Pages (from-to)362-367
Number of pages6
JournalApplied Surface Science
Volume197-198
DOIs
StatePublished - Jan 1 2002
EventCola 2001 - Tsukuba, Japan
Duration: Oct 1 2001Oct 1 2001

Fingerprint

Pulsed laser deposition
pulsed laser deposition
Electric properties
Optical properties
electrical properties
optical properties
fluence
oxygen
Substrates
Oxygen
Lasers
lasers
Quartz
Oxygen vacancies
optical measurement
Temperature
electrical measurement
temperature
Zinc
quartz

Keywords

  • Pulsed laser deposition
  • Raman spectroscopy
  • Sheet resistivity
  • Transmittance spectra
  • X-ray diffraction
  • Zinc oxide

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition. / Zeng, Ji Nan; Low, Juay Kiang; Ren, Zhong Min; Liew, Thomas; Lu, Yongfeng.

In: Applied Surface Science, Vol. 197-198, 01.01.2002, p. 362-367.

Research output: Contribution to journalConference article

Zeng, Ji Nan ; Low, Juay Kiang ; Ren, Zhong Min ; Liew, Thomas ; Lu, Yongfeng. / Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition. In: Applied Surface Science. 2002 ; Vol. 197-198. pp. 362-367.
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