Dry laser cleaning of particles from solid substrates: Experiments and theory

Y. W. Zheng, B. S. Luk'yanchuk, Y. F. Lu, W. D. Song, Z. H. Mai

Research output: Contribution to journalArticle

76 Citations (Scopus)

Abstract

The experimental analysis of dry laser cleaning efficiency is done for certified spherical particle (SiO 2 , 5.0, 2.5, 1.0, and 0.5 μm) from different substrates (Si, Ge, and NiP). The influence of different options (laser wavelength, incident angle, substrate properties, i.e., type of material, surface roughness, etc.) on the cleaning efficiency is presented in addition to commonly analyzed options (cleaning efficiency versus laser fluence and particle size). Found laser cleaning efficiency demonstrates a great sensitivity to some of these options (e.g., laser wavelength, angle of incidence, etc.). Partially these effects can be explained within the frame of the microelectronics engineering (MIE) theory of scattering. Other effects (e.g., influence of roughness) can be explained along the more complex line, related to examination of the problem "particle on the surface" beyond the MIE theory. The theory of dry laser cleaning, based on one-dimensional thermal expansion of the substrate, demonstrates a great sensitivity of the cleaning efficiency on laser pulse shape. For the reasonable pulse shape this theory yields the threshold fluence by the order of magnitude larger than the experimental one. At the same time the theory, which takes into account the near-field optical enhancement and three-dimensional thermal expansion effects, yields the correct values for threshold.

Original languageEnglish (US)
Pages (from-to)2135-2142
Number of pages8
JournalJournal of Applied Physics
Volume90
Issue number5
DOIs
StatePublished - Sep 1 2001

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cleaning
lasers
microelectronics
thermal expansion
fluence
engineering
thresholds
sensitivity
pulses
wavelengths
near fields
surface roughness
roughness
incidence
examination
augmentation
scattering

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Dry laser cleaning of particles from solid substrates : Experiments and theory. / Zheng, Y. W.; Luk'yanchuk, B. S.; Lu, Y. F.; Song, W. D.; Mai, Z. H.

In: Journal of Applied Physics, Vol. 90, No. 5, 01.09.2001, p. 2135-2142.

Research output: Contribution to journalArticle

Zheng, Y. W. ; Luk'yanchuk, B. S. ; Lu, Y. F. ; Song, W. D. ; Mai, Z. H. / Dry laser cleaning of particles from solid substrates : Experiments and theory. In: Journal of Applied Physics. 2001 ; Vol. 90, No. 5. pp. 2135-2142.
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