DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.

Joel D. Lamb, John A Woollam

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

Original languageEnglish (US)
Number of pages1
JournalExtended Abstracts and Program - Biennial Conference on Carbon
StatePublished - Dec 1 1985

Fingerprint

Plasma deposition
Carbon films
Indium phosphide
Chemical attack
Interface states
Integrated circuits
Silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

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title = "DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.",
abstract = "The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.",
author = "Lamb, {Joel D.} and Woollam, {John A}",
year = "1985",
month = "12",
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language = "English (US)",
journal = "Extended Abstracts and Program - Biennial Conference on Carbon",
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AU - Lamb, Joel D.

AU - Woollam, John A

PY - 1985/12/1

Y1 - 1985/12/1

N2 - The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

AB - The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

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M3 - Conference article

JO - Extended Abstracts and Program - Biennial Conference on Carbon

JF - Extended Abstracts and Program - Biennial Conference on Carbon

SN - 0160-7464

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