DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.

Joel D. Lamb, John A. Woollam

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

Original languageEnglish (US)
Number of pages1
JournalExtended Abstracts and Program - Biennial Conference on Carbon
Publication statusPublished - Dec 1 1985

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ASJC Scopus subject areas

  • Engineering(all)

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