Dielectric properties of "diamondlike" carbon prepared by rf plasma deposition

Joel D. Lamb, John A. Woollam

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Abstract

Metal-carbon-metal structures were fabricated using either gold or aluminum evaporated electrodes and rf plasma (methane) deposited "diamondlike" carbon films. ac-conductance and capacitance versus voltage and frequency (10 Hz to 13 MHz) data were taken to determine the dielectric properties of these films. Conductance versus frequency data fit a generalized power law, consistent with both dc and hopping conduction components. The capacitance versus frequency data are well matched to the conductance versus frequency data, as predicted by a Kramers-Kronig analysis. The dielectric loss tangent is nearly constant at 0.5 to 1.0% over the frequency range from 1 to 100 kHz. The dc resistivity is above 1013 Ω cm, and the dc breakdown strength is above 8×106 V/cm in properly prepared samples.

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Dielectric properties of "diamondlike" carbon prepared by rf plasma deposition. / Lamb, Joel D.; Woollam, John A.

In: Journal of Applied Physics, Vol. 57, No. 12, 01.12.1985, p. 5420-5423.

Research output: Contribution to journalArticle