Determination of AlAs optical constants by variable angle spectroscopic ellipsometry and a multisample analysis

C. M. Herzinger, H. Yao, P. G. Snyder, F. G. Celii, Y. C. Kao, B. Johs, J. A. Woollam

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Abstract

Using variable angle spectroscopic ellipsometry, optical constants for AlAs (1.4-5.0 eV) are presented which are simultaneously compatible with measured data from four different samples. The below-gap index values are compatible with published prism measured values. The second derivative spectrum are compatible with published values above the direct band gap. The AlAs spectra is Kramers-Kronig self-consistent over the measured range and is compatible with published values from 0.6 to 1.4 eV. The optical constants for thin (<50 Å) GaAs caps on AlAs are shown to be different from bulk GaAs values and require special consideration when fitting ellipsometric data. For the thin GaAs caps, the E1 and E11 critical-point structure is shifted to higher energies as previously observed for GaAs quantum wells. Bulk AlAs optical constants are shown to be different from those of a thin (∼20 Å) AlAs barrier layer embedded in GaAs. The thin barrier layer exhibits a highly broadened critical-point structure. This barrier broadening effect (AlAs) and the thin cap shifting effects (GaAs) have implications for in situ growth control schemes which make use of the E 1 and E11 critical-point region.

Original languageEnglish (US)
Pages (from-to)4677-4687
Number of pages11
JournalJournal of Applied Physics
Volume77
Issue number9
DOIs
StatePublished - Dec 1 1995

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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