Design of a piezoelectric based sensor for applications at high temperature

B. R. Jooste, S. Schroeder, Hendrik J Viljoen

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Ta 2O 5 films were sputter deposited in a magnetron sputtering system. Piezoelectric sensing abilities were observed after annealing above 800 °C. Sensors annealed at 900 °C. showed good response at room temperature. The annealed β-Ta 2O 5 film was orthorhombic and had a symmetry of 2 mm. Inconel is a suitable substrate for high temperature sensing applications of piezoelectric β-Ta 2O 5.

Original languageEnglish (US)
Title of host publicationCeramic Engineering and Science Proceedings
PublisherAmerican Ceramic Soc
Pages739-746
Number of pages8
Volume18
Edition4 B
StatePublished - 1997
EventProceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B - Cocoa, FL, USA
Duration: Jan 12 1997Jan 16 1997

Other

OtherProceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B
CityCocoa, FL, USA
Period1/12/971/16/97

Fingerprint

Sensors
Magnetron sputtering
Annealing
Temperature
Substrates

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Jooste, B. R., Schroeder, S., & Viljoen, H. J. (1997). Design of a piezoelectric based sensor for applications at high temperature. In Ceramic Engineering and Science Proceedings (4 B ed., Vol. 18, pp. 739-746). American Ceramic Soc.

Design of a piezoelectric based sensor for applications at high temperature. / Jooste, B. R.; Schroeder, S.; Viljoen, Hendrik J.

Ceramic Engineering and Science Proceedings. Vol. 18 4 B. ed. American Ceramic Soc, 1997. p. 739-746.

Research output: Chapter in Book/Report/Conference proceedingChapter

Jooste, BR, Schroeder, S & Viljoen, HJ 1997, Design of a piezoelectric based sensor for applications at high temperature. in Ceramic Engineering and Science Proceedings. 4 B edn, vol. 18, American Ceramic Soc, pp. 739-746, Proceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B, Cocoa, FL, USA, 1/12/97.
Jooste BR, Schroeder S, Viljoen HJ. Design of a piezoelectric based sensor for applications at high temperature. In Ceramic Engineering and Science Proceedings. 4 B ed. Vol. 18. American Ceramic Soc. 1997. p. 739-746
Jooste, B. R. ; Schroeder, S. ; Viljoen, Hendrik J. / Design of a piezoelectric based sensor for applications at high temperature. Ceramic Engineering and Science Proceedings. Vol. 18 4 B. ed. American Ceramic Soc, 1997. pp. 739-746
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