Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature

Zhong Min Ren, Yong Feng Lu, Yeow Whatt Goh, Tow Chong Chong, Mei Ling Ng, Jian Ping Wang, Boon Aik Cheong, Yun Fook Liew

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Cubic AlN thin films were deposited at room temperature by nitrogen-ion-assisted pulsed laser ablation of a hexagonal AlN target. The full-width at half maximum (FWHM) of the X-ray diffraction peak in the θ to approximately 2θ scan can reach a value of 0.27 degrees. In the Raman spectroscopy measurement, a new peak at 2333 cm-1 originating from cubic AlN polycrystalline was observed. Nitrogen ions not only effectively promote the formation of stable Al-N bonds but also improve the crystal properties of the deposited thin films. A nitrogen ion energy of 400 eV is proposed for the thin-film deposition.

Original languageEnglish (US)
Pages (from-to)L423-L425
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume39
Issue number5 A
StatePublished - Dec 3 2000

Fingerprint

nitrogen ions
Crystal structure
Nitrogen
Thin films
Silicon
crystal structure
Ions
silicon
room temperature
Substrates
thin films
Laser ablation
Full width at half maximum
Pulsed lasers
Temperature
laser ablation
Raman spectroscopy
pulsed lasers
X ray diffraction
Crystals

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Ren, Z. M., Lu, Y. F., Goh, Y. W., Chong, T. C., Ng, M. L., Wang, J. P., ... Liew, Y. F. (2000). Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature. Japanese Journal of Applied Physics, Part 2: Letters, 39(5 A), L423-L425.

Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature. / Ren, Zhong Min; Lu, Yong Feng; Goh, Yeow Whatt; Chong, Tow Chong; Ng, Mei Ling; Wang, Jian Ping; Cheong, Boon Aik; Liew, Yun Fook.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 39, No. 5 A, 03.12.2000, p. L423-L425.

Research output: Contribution to journalArticle

Ren, ZM, Lu, YF, Goh, YW, Chong, TC, Ng, ML, Wang, JP, Cheong, BA & Liew, YF 2000, 'Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature', Japanese Journal of Applied Physics, Part 2: Letters, vol. 39, no. 5 A, pp. L423-L425.
Ren, Zhong Min ; Lu, Yong Feng ; Goh, Yeow Whatt ; Chong, Tow Chong ; Ng, Mei Ling ; Wang, Jian Ping ; Cheong, Boon Aik ; Liew, Yun Fook. / Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature. In: Japanese Journal of Applied Physics, Part 2: Letters. 2000 ; Vol. 39, No. 5 A. pp. L423-L425.
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AU - Wang, Jian Ping

AU - Cheong, Boon Aik

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