CO2 laser-assisted local deposition of diamond films by combustion-flame method

H. Ling, Y. X. Han, Y. F. Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Quality of diamond films is strongly dependent on substrate temperatures, which are usually controlled in a range of 600 - 1100°C in most experiments. Although many applications have been achieved with these techniques, diamond film growth is still not possible for substrates that cannot endure such high temperatures for long time. In this study, a continue-wave (CW) CO2 laser was used to irradiate the growth area on tungsten carbide (WC) substrates during C2H2/O2 combustion-flame deposition in order to maintain required temperature in the growth area while keep the rest of the substrates at a low temperature. The laser power was adjusted between 200 - 600 W to study the effects of laser irradiation on diamond deposition. Surface morphologies of die deposited films were examined by a scanning electron microscope (SEM). Film structures were characterized by Raman spectroscopy. It was concluded that the CO2 laser irradiation during combustion-flame deposition could raise the temperature at the growth area efficiently. Both laser power and power density have effects on the diamond deposition. Laser irradiation with proper parameters could improve the crystal quality of the diamond films. Based on the experimental results, the CO2 laser-assisted combustion-flame deposition is a promising method for local substrate heating during diamond film growth.

Original languageEnglish (US)
Title of host publicationLaser-based Micro- and Nanopackaging and Assembly
DOIs
Publication statusPublished - May 22 2007
EventLaser-based Micro- and Nanopackaging and Assembly - San Jose, CA, United States
Duration: Jan 22 2007Jan 24 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6459
ISSN (Print)0277-786X

Conference

ConferenceLaser-based Micro- and Nanopackaging and Assembly
CountryUnited States
CitySan Jose, CA
Period1/22/071/24/07

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Keywords

  • CO laser-assisted local deposition
  • Combustion-flame method
  • Diamond films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Ling, H., Han, Y. X., & Lu, Y. F. (2007). CO2 laser-assisted local deposition of diamond films by combustion-flame method. In Laser-based Micro- and Nanopackaging and Assembly [64590Y] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6459). https://doi.org/10.1117/12.700724