Controllable Si (100) micro/nanostructures by chemical-etching-assisted femtosecond laser single-pulse irradiation

Research output: Contribution to journalArticle

4 Scopus citations
Original languageEnglish (US)
Article number181907
JournalApplied Physics Letters
Volume110
Issue number18
DOIs
Publication statusPublished - May 1 2017

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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