Control of etching behavior of MnZn ferrite in a laser-chemical reaction by MeV ion beam modification

Y. F. Lu, M. Takai, S. Namba, H. Sanda, A. Chayahara, M. Satou

Research output: Contribution to journalArticle


Laser-induced etching of MnZn ferrite samples implanted with MeV ions has been investigated. The etching induced by Ar+ -laser irradiation in a H3PO4 solution was completely suppressed by implanting 3 MeV Au+ to a dose of 1 × 1016 cm-2 when the laser-induced local temperature rise was below the melting point of the ferrite. The etching suppression disappeared when the Au+ -implanted sample was thermally annealed at 900° C for 30 min. The suppression is found to be related to the crystallinity change induced by ion implantation. The decrease in surface magnetization induced by ion implantation can be recovered by thermal annealing at 900° C for 30 min.

Original languageEnglish (US)
Pages (from-to)861-864
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Issue numberPART 2
Publication statusPublished - Jul 1 1991


ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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