Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method

Travis McKindra, Matthew J. O'Keefe, Zhiqiang Xie, Yongfeng Lu

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Diamond thin films were deposited by a CO2 laser-assisted O 2/C2H2/C2H4 combustion-flame process. The effect of the deposition parameters, in particular the laser wavelength and power, on the film surface morphology, microstructure and phases present was the primary focus of the work. The laser power was set at 100, 400 and 800 W while the wavelength was varied and set at 10.591 μm in the untuned condition and set at 10.532 μm to resonantly match the CH 2-wagging vibrational mode of the C2H4 molecule when in the tuned condition. When the laser was coupled to the combustion flame during deposition the diamond film growth was enhanced as the lateral grain size increased from 1 μm to greater than 5 μm. The greatest increase in grain size occurred when the wavelength was in the tuned condition. Scanning transmission electron microscopy images from focused-ion beam cross-sectioned samples revealed a sub-layer of smaller grains less than 1 μm in size near the substrate surface at the lower laser powers and untuned wavelength. X-ray diffraction results showed a more intense Diamond (111) peak as the laser power increased from 100 to 800 W for the films deposited with the tuned laser wavelength. Micro-Raman spectra showed a diamond peak nearly twice as intense from the films with the tuned laser wavelength.

Original languageEnglish (US)
Pages (from-to)661-667
Number of pages7
JournalMaterials Characterization
Volume61
Issue number6
DOIs
StatePublished - Jun 1 2010

Fingerprint

Diamond films
flames
diamonds
Thin films
Lasers
thin films
Wavelength
lasers
wavelengths
Diamond
Diamonds
grain size
Focused ion beams
Film growth
diamond films
Surface morphology
Raman scattering
vibration mode
ion beams
methylidyne

Keywords

  • Diamond thin films
  • Electron microscopy
  • Laser-assisted combustion-flame deposition
  • Raman spectroscopy
  • X-ray diffraction

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method. / McKindra, Travis; O'Keefe, Matthew J.; Xie, Zhiqiang; Lu, Yongfeng.

In: Materials Characterization, Vol. 61, No. 6, 01.06.2010, p. 661-667.

Research output: Contribution to journalArticle

McKindra, Travis ; O'Keefe, Matthew J. ; Xie, Zhiqiang ; Lu, Yongfeng. / Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method. In: Materials Characterization. 2010 ; Vol. 61, No. 6. pp. 661-667.
@article{c343c11bb5c847d58d7aaaf76e029834,
title = "Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method",
abstract = "Diamond thin films were deposited by a CO2 laser-assisted O 2/C2H2/C2H4 combustion-flame process. The effect of the deposition parameters, in particular the laser wavelength and power, on the film surface morphology, microstructure and phases present was the primary focus of the work. The laser power was set at 100, 400 and 800 W while the wavelength was varied and set at 10.591 μm in the untuned condition and set at 10.532 μm to resonantly match the CH 2-wagging vibrational mode of the C2H4 molecule when in the tuned condition. When the laser was coupled to the combustion flame during deposition the diamond film growth was enhanced as the lateral grain size increased from 1 μm to greater than 5 μm. The greatest increase in grain size occurred when the wavelength was in the tuned condition. Scanning transmission electron microscopy images from focused-ion beam cross-sectioned samples revealed a sub-layer of smaller grains less than 1 μm in size near the substrate surface at the lower laser powers and untuned wavelength. X-ray diffraction results showed a more intense Diamond (111) peak as the laser power increased from 100 to 800 W for the films deposited with the tuned laser wavelength. Micro-Raman spectra showed a diamond peak nearly twice as intense from the films with the tuned laser wavelength.",
keywords = "Diamond thin films, Electron microscopy, Laser-assisted combustion-flame deposition, Raman spectroscopy, X-ray diffraction",
author = "Travis McKindra and O'Keefe, {Matthew J.} and Zhiqiang Xie and Yongfeng Lu",
year = "2010",
month = "6",
day = "1",
doi = "10.1016/j.matchar.2010.03.011",
language = "English (US)",
volume = "61",
pages = "661--667",
journal = "Materials Characterization",
issn = "1044-5803",
publisher = "Elsevier Inc.",
number = "6",

}

TY - JOUR

T1 - Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method

AU - McKindra, Travis

AU - O'Keefe, Matthew J.

AU - Xie, Zhiqiang

AU - Lu, Yongfeng

PY - 2010/6/1

Y1 - 2010/6/1

N2 - Diamond thin films were deposited by a CO2 laser-assisted O 2/C2H2/C2H4 combustion-flame process. The effect of the deposition parameters, in particular the laser wavelength and power, on the film surface morphology, microstructure and phases present was the primary focus of the work. The laser power was set at 100, 400 and 800 W while the wavelength was varied and set at 10.591 μm in the untuned condition and set at 10.532 μm to resonantly match the CH 2-wagging vibrational mode of the C2H4 molecule when in the tuned condition. When the laser was coupled to the combustion flame during deposition the diamond film growth was enhanced as the lateral grain size increased from 1 μm to greater than 5 μm. The greatest increase in grain size occurred when the wavelength was in the tuned condition. Scanning transmission electron microscopy images from focused-ion beam cross-sectioned samples revealed a sub-layer of smaller grains less than 1 μm in size near the substrate surface at the lower laser powers and untuned wavelength. X-ray diffraction results showed a more intense Diamond (111) peak as the laser power increased from 100 to 800 W for the films deposited with the tuned laser wavelength. Micro-Raman spectra showed a diamond peak nearly twice as intense from the films with the tuned laser wavelength.

AB - Diamond thin films were deposited by a CO2 laser-assisted O 2/C2H2/C2H4 combustion-flame process. The effect of the deposition parameters, in particular the laser wavelength and power, on the film surface morphology, microstructure and phases present was the primary focus of the work. The laser power was set at 100, 400 and 800 W while the wavelength was varied and set at 10.591 μm in the untuned condition and set at 10.532 μm to resonantly match the CH 2-wagging vibrational mode of the C2H4 molecule when in the tuned condition. When the laser was coupled to the combustion flame during deposition the diamond film growth was enhanced as the lateral grain size increased from 1 μm to greater than 5 μm. The greatest increase in grain size occurred when the wavelength was in the tuned condition. Scanning transmission electron microscopy images from focused-ion beam cross-sectioned samples revealed a sub-layer of smaller grains less than 1 μm in size near the substrate surface at the lower laser powers and untuned wavelength. X-ray diffraction results showed a more intense Diamond (111) peak as the laser power increased from 100 to 800 W for the films deposited with the tuned laser wavelength. Micro-Raman spectra showed a diamond peak nearly twice as intense from the films with the tuned laser wavelength.

KW - Diamond thin films

KW - Electron microscopy

KW - Laser-assisted combustion-flame deposition

KW - Raman spectroscopy

KW - X-ray diffraction

UR - http://www.scopus.com/inward/record.url?scp=77955230699&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955230699&partnerID=8YFLogxK

U2 - 10.1016/j.matchar.2010.03.011

DO - 10.1016/j.matchar.2010.03.011

M3 - Article

AN - SCOPUS:77955230699

VL - 61

SP - 661

EP - 667

JO - Materials Characterization

JF - Materials Characterization

SN - 1044-5803

IS - 6

ER -