Automatic control and real-time monitoring of laser cleaning and laser ablation

Yongfeng Lu, M. Meng, M. H. Hong, T. S. Low, D. S H Chan

Research output: Contribution to journalConference article

6 Citations (Scopus)

Abstract

Closed-loop control and real-time monitoring of pulsed excimer laser cleaning and ablation have been realized by software and hardware design and development. The audible acoustic wave generated during excimer laser surface cleaning and ablation has been used as the feedback signal for the automatic control system of laser-surface interaction. Man-machine interface for laser operation and acoustic monitoring has been developed with Lab VIEW 4.1 under Windows 95 environment. This system has been used to control and monitor laser cleaning and ablation processes in real-time and proven to successfully meet the requirements in our study. By database exchange, this automatic control system can also be applied to control drilling and materials removing.

Original languageEnglish (US)
Pages (from-to)149-156
Number of pages8
JournalMaterials Research Society Symposium - Proceedings
Volume526
StatePublished - Dec 1 1998
EventProceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 13 1998Apr 16 1998

Fingerprint

automatic control
Laser ablation
cleaning
laser ablation
ablation
Cleaning
Ablation
Lasers
Monitoring
lasers
Excimer lasers
excimer lasers
Surface cleaning
Control systems
acoustics
Pulsed lasers
drilling
surface reactions
monitors
pulsed lasers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Automatic control and real-time monitoring of laser cleaning and laser ablation. / Lu, Yongfeng; Meng, M.; Hong, M. H.; Low, T. S.; Chan, D. S H.

In: Materials Research Society Symposium - Proceedings, Vol. 526, 01.12.1998, p. 149-156.

Research output: Contribution to journalConference article

Lu, Yongfeng ; Meng, M. ; Hong, M. H. ; Low, T. S. ; Chan, D. S H. / Automatic control and real-time monitoring of laser cleaning and laser ablation. In: Materials Research Society Symposium - Proceedings. 1998 ; Vol. 526. pp. 149-156.
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