Automated spectroscopic ellipsometry

James Hilfiker, John A Woollam, Greg Mowry, Peter Chow, James Elman

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Ellipsometers have been used to measure the thicknesses of very thin films, such as microelectronics components on ever-shrinking integrated circuits. For nanometer-scale dimensions, ellipsometer are accurate, convenient, economical, and fast. Furthermore, ellipsometer measurements are completely non-destructive, do not require mechanical contact with sample, and can be made easily and rapidly with computer control.

Original languageEnglish (US)
JournalIndustrial Physicist
Volume2
Issue number1
StatePublished - Mar 1 1996

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ellipsometers
ellipsometry
microelectronics
integrated circuits
thin films

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Hilfiker, J., Woollam, J. A., Mowry, G., Chow, P., & Elman, J. (1996). Automated spectroscopic ellipsometry. Industrial Physicist, 2(1).

Automated spectroscopic ellipsometry. / Hilfiker, James; Woollam, John A; Mowry, Greg; Chow, Peter; Elman, James.

In: Industrial Physicist, Vol. 2, No. 1, 01.03.1996.

Research output: Contribution to journalArticle

Hilfiker, J, Woollam, JA, Mowry, G, Chow, P & Elman, J 1996, 'Automated spectroscopic ellipsometry', Industrial Physicist, vol. 2, no. 1.
Hilfiker J, Woollam JA, Mowry G, Chow P, Elman J. Automated spectroscopic ellipsometry. Industrial Physicist. 1996 Mar 1;2(1).
Hilfiker, James ; Woollam, John A ; Mowry, Greg ; Chow, Peter ; Elman, James. / Automated spectroscopic ellipsometry. In: Industrial Physicist. 1996 ; Vol. 2, No. 1.
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