Atomic force acoustic microscopy methods to determine thin-film elastic properties

D. C. Hurley, K. Shen, N. M. Jennett, J. A. Turner

Research output: Contribution to journalArticle

140 Citations (Scopus)

Abstract

Elastic properties of thin films were discussed. Atomic force acoustic microscopy (AFAM) methods were observed. Results showed that the values of indentation modulus varied significantly. These methods helps in attaining reliable, accurate measurements of elastic properties on the nanoscale.

Original languageEnglish (US)
Pages (from-to)2347-2354
Number of pages8
JournalJournal of Applied Physics
Volume94
Issue number4
DOIs
StatePublished - Aug 15 2003

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elastic properties
microscopy
acoustics
thin films
indentation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Atomic force acoustic microscopy methods to determine thin-film elastic properties. / Hurley, D. C.; Shen, K.; Jennett, N. M.; Turner, J. A.

In: Journal of Applied Physics, Vol. 94, No. 4, 15.08.2003, p. 2347-2354.

Research output: Contribution to journalArticle

Hurley, D. C. ; Shen, K. ; Jennett, N. M. ; Turner, J. A. / Atomic force acoustic microscopy methods to determine thin-film elastic properties. In: Journal of Applied Physics. 2003 ; Vol. 94, No. 4. pp. 2347-2354.
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