### Abstract

We report the extension of the spectroscopic rotating- analyzer- ellipsometry to generalized ellipsometry (GE) in order to define and to determine three essentially normalized elements of the optical JONES matrix J. These elements can be measured in reflection or transmission arrangement regardless of the specific structural and/or anisotropic properties of a particular sample. A 4 by 4- matrix algebra has ben presented for electromagnetic plane waves reflected or transmitted at arbitrarily anisotropic and homogeneous layered systems including a special solution for continuously twisted biaxial materials. This algorithm has a general approach for materials with linear optical response behavior. The optical JONES matrix represents the experimental link to the 4 by 4-matrix algebra. The combination of both, the 4 by 4-matrix algorithm and GE allows for the analysis of complex layered samples containing anisotropic materials. We report on the application of GE to birefringent dielectrics, chiral liquid crystals and spontaneously ordered III-V compounds. From a regression analysis we obtain the intrinsic optical properties of the anisotropic materials.

Original language | English (US) |
---|---|

Pages (from-to) | 255-265 |

Number of pages | 11 |

Journal | Proceedings of SPIE - The International Society for Optical Engineering |

Volume | 3094 |

DOIs | |

State | Published - Dec 1 1997 |

Event | Polarimetry and Ellipsometry - Kazimierz Dolny, Poland Duration: May 20 1996 → May 20 1996 |

### Fingerprint

### Keywords

- Anisotropy
- Generalized ellipsometry
- Liquid crystals
- Optical Jones matrix
- Refractive indices

### ASJC Scopus subject areas

- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering

### Cite this

*Proceedings of SPIE - The International Society for Optical Engineering*,

*3094*, 255-265. https://doi.org/10.1117/12.271823

**Application of generalized ellipsometry to complex optical systems.** / Schubert, Mathias; Rheinländer, Bernd; Woollam, John A.; Johs, Blaine D.; Herzinger, Craig M.

Research output: Contribution to journal › Conference article

*Proceedings of SPIE - The International Society for Optical Engineering*, vol. 3094, pp. 255-265. https://doi.org/10.1117/12.271823

}

TY - JOUR

T1 - Application of generalized ellipsometry to complex optical systems

AU - Schubert, Mathias

AU - Rheinländer, Bernd

AU - Woollam, John A.

AU - Johs, Blaine D.

AU - Herzinger, Craig M.

PY - 1997/12/1

Y1 - 1997/12/1

N2 - We report the extension of the spectroscopic rotating- analyzer- ellipsometry to generalized ellipsometry (GE) in order to define and to determine three essentially normalized elements of the optical JONES matrix J. These elements can be measured in reflection or transmission arrangement regardless of the specific structural and/or anisotropic properties of a particular sample. A 4 by 4- matrix algebra has ben presented for electromagnetic plane waves reflected or transmitted at arbitrarily anisotropic and homogeneous layered systems including a special solution for continuously twisted biaxial materials. This algorithm has a general approach for materials with linear optical response behavior. The optical JONES matrix represents the experimental link to the 4 by 4-matrix algebra. The combination of both, the 4 by 4-matrix algorithm and GE allows for the analysis of complex layered samples containing anisotropic materials. We report on the application of GE to birefringent dielectrics, chiral liquid crystals and spontaneously ordered III-V compounds. From a regression analysis we obtain the intrinsic optical properties of the anisotropic materials.

AB - We report the extension of the spectroscopic rotating- analyzer- ellipsometry to generalized ellipsometry (GE) in order to define and to determine three essentially normalized elements of the optical JONES matrix J. These elements can be measured in reflection or transmission arrangement regardless of the specific structural and/or anisotropic properties of a particular sample. A 4 by 4- matrix algebra has ben presented for electromagnetic plane waves reflected or transmitted at arbitrarily anisotropic and homogeneous layered systems including a special solution for continuously twisted biaxial materials. This algorithm has a general approach for materials with linear optical response behavior. The optical JONES matrix represents the experimental link to the 4 by 4-matrix algebra. The combination of both, the 4 by 4-matrix algorithm and GE allows for the analysis of complex layered samples containing anisotropic materials. We report on the application of GE to birefringent dielectrics, chiral liquid crystals and spontaneously ordered III-V compounds. From a regression analysis we obtain the intrinsic optical properties of the anisotropic materials.

KW - Anisotropy

KW - Generalized ellipsometry

KW - Liquid crystals

KW - Optical Jones matrix

KW - Refractive indices

UR - http://www.scopus.com/inward/record.url?scp=0001536277&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001536277&partnerID=8YFLogxK

U2 - 10.1117/12.271823

DO - 10.1117/12.271823

M3 - Conference article

AN - SCOPUS:0001536277

VL - 3094

SP - 255

EP - 265

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -