Analysis of thickness vibrations of C-axis inclined aluminum-nitrogen thin film resonators

Haifeng Zhang, Joseph A. Turner, John A. Kosinski

Research output: Contribution to journalConference article

14 Citations (Scopus)

Abstract

The effect of the C-axis angle of inclination on the thickness vibration modes of Thin Film Bulk Acoustic Wave Resonators (FBAR) is discussed. Theoretical analysis for the frequency equation and mode shape of C-axis inclined FBAR connected with an external impedance is carried out. The impedance characteristics of FBAR are derived and compared with previous experimental results.

Original languageEnglish (US)
Pages (from-to)95-108
Number of pages14
JournalIntegrated Ferroelectrics
Volume113
Issue number1
DOIs
StatePublished - Dec 1 2009
Event21st International Symposium on Integrated Ferroelectrics and Functionalities, ISIF2 2009 - Colorado Springs, CO, United States
Duration: Sep 27 2009Sep 30 2009

Fingerprint

Aluminum
Resonators
Acoustic impedance
Nitrogen
resonators
Acoustic waves
aluminum
nitrogen
Thin films
vibration
acoustics
thin films
impedance
modal response
Vibrations (mechanical)
inclination
vibration mode

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Analysis of thickness vibrations of C-axis inclined aluminum-nitrogen thin film resonators. / Zhang, Haifeng; Turner, Joseph A.; Kosinski, John A.

In: Integrated Ferroelectrics, Vol. 113, No. 1, 01.12.2009, p. 95-108.

Research output: Contribution to journalConference article

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