An overview of laser microprocessing in data storage industry

T. C. Chong, Yongfeng Lu

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

An overview of laser microprocessing in data storage industry was presented. Real-time monitoring of laser surface processing was investigated to improve the performance of laser microprocessing technology. Laser nano-etching and nanolithography were realized by atomic force microscopy (AFM) tip-enhanced laser irradiation through combination of laser microprocessing and scanning profile microscope (SPM) techniques.

Original languageEnglish (US)
Pages (from-to)17-24
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
StatePublished - Jan 1 2002
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001

Fingerprint

Data Storage
data storage
industries
Industry
Laser
Data storage equipment
Lasers
lasers
Nanolithography
Laser beam effects
Atomic Force Microscopy
Etching
Atomic force microscopy
Microscopes
Irradiation
Microscope
Scanning
microscopes
etching
atomic force microscopy

Keywords

  • Data storage
  • Laser bumping
  • Laser cleaning
  • Laser microprocessing
  • Laser nanoprocessing
  • Laser texturing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

An overview of laser microprocessing in data storage industry. / Chong, T. C.; Lu, Yongfeng.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4426, 01.01.2002, p. 17-24.

Research output: Contribution to journalConference article

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