AMORPHOUS HYDROGENATED 'DIAMONDLIKE' CARBON DIELECTRIC FILMS.

Research output: Contribution to journalConference article

Abstract

Films of amorphous carbon can be prepared which are black, conducting and soft (by evaporation). Conversely, by supplying sufficiently energetic species a very hard, transparent, highly resistive carbon film can be prepared. This paper deals with the latter type films, which were first prepared in the 1960's. Research was at a relatively low level until a rapid growth of interest in the past few years. The usefulness of these films results from their reported hardness, pinhole free coverage, acid and solvent resistance, optical transparency, low deposition temperature, and constancy of properties at elevated temperatures. Example substrates where bonding is excellent include polished wafers of silicon, germanium, gallium arsenide, indium phosphide, indium antimonide, and fused silica.

Original languageEnglish (US)
Number of pages1
JournalElectrochemical Society Extended Abstracts
Volume85-2
StatePublished - Dec 1 1985

Fingerprint

Dielectric films
Carbon films
Indium phosphide
Gallium arsenide
Amorphous carbon
Fused silica
Germanium
Transparency
Indium
Evaporation
Hardness
Silicon
Temperature
Acids
Substrates

ASJC Scopus subject areas

  • Engineering(all)

Cite this

AMORPHOUS HYDROGENATED 'DIAMONDLIKE' CARBON DIELECTRIC FILMS. / Woollam, John A.

In: Electrochemical Society Extended Abstracts, Vol. 85-2, 01.12.1985.

Research output: Contribution to journalConference article

@article{643a722b07384e2e9f403e29a725ae13,
title = "AMORPHOUS HYDROGENATED 'DIAMONDLIKE' CARBON DIELECTRIC FILMS.",
abstract = "Films of amorphous carbon can be prepared which are black, conducting and soft (by evaporation). Conversely, by supplying sufficiently energetic species a very hard, transparent, highly resistive carbon film can be prepared. This paper deals with the latter type films, which were first prepared in the 1960's. Research was at a relatively low level until a rapid growth of interest in the past few years. The usefulness of these films results from their reported hardness, pinhole free coverage, acid and solvent resistance, optical transparency, low deposition temperature, and constancy of properties at elevated temperatures. Example substrates where bonding is excellent include polished wafers of silicon, germanium, gallium arsenide, indium phosphide, indium antimonide, and fused silica.",
author = "Woollam, {John A.}",
year = "1985",
month = "12",
day = "1",
language = "English (US)",
volume = "85-2",
journal = "Electrochemical Society Extended Abstracts",
issn = "0160-4619",

}

TY - JOUR

T1 - AMORPHOUS HYDROGENATED 'DIAMONDLIKE' CARBON DIELECTRIC FILMS.

AU - Woollam, John A.

PY - 1985/12/1

Y1 - 1985/12/1

N2 - Films of amorphous carbon can be prepared which are black, conducting and soft (by evaporation). Conversely, by supplying sufficiently energetic species a very hard, transparent, highly resistive carbon film can be prepared. This paper deals with the latter type films, which were first prepared in the 1960's. Research was at a relatively low level until a rapid growth of interest in the past few years. The usefulness of these films results from their reported hardness, pinhole free coverage, acid and solvent resistance, optical transparency, low deposition temperature, and constancy of properties at elevated temperatures. Example substrates where bonding is excellent include polished wafers of silicon, germanium, gallium arsenide, indium phosphide, indium antimonide, and fused silica.

AB - Films of amorphous carbon can be prepared which are black, conducting and soft (by evaporation). Conversely, by supplying sufficiently energetic species a very hard, transparent, highly resistive carbon film can be prepared. This paper deals with the latter type films, which were first prepared in the 1960's. Research was at a relatively low level until a rapid growth of interest in the past few years. The usefulness of these films results from their reported hardness, pinhole free coverage, acid and solvent resistance, optical transparency, low deposition temperature, and constancy of properties at elevated temperatures. Example substrates where bonding is excellent include polished wafers of silicon, germanium, gallium arsenide, indium phosphide, indium antimonide, and fused silica.

UR - http://www.scopus.com/inward/record.url?scp=0022300733&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0022300733&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0022300733

VL - 85-2

JO - Electrochemical Society Extended Abstracts

JF - Electrochemical Society Extended Abstracts

SN - 0160-4619

ER -