Amorphous hydrogenated carbon synthesized by pulsed laser deposition from cyclohexane

Y. F. Lu, S. M. Huang, C. H.A. Huan, X. F. Luo

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

It is demonstrated that a liquid hydrocarbon precursor, cyclohexane, is appropriate for laser-induced carbon deposition. Amorphous hydrogenated carbon films (a-C:H) were deposited by KrF excimer laser irradiation of single-crystal silicon surface immersed under cyclohexane. The technique is simple and easy to operate. IR absorption spectra of the deposited films confirmed the presence of carbon in the diamond phase. Raman and XPS studies showed diamond-like character of the deposited films. Moreover, these two studies provided strong evidence that laser fluence played an important role in the formation of DLC bondings and the quality of the deposited films.

Original languageEnglish (US)
Pages (from-to)647-651
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Volume68
Issue number6
DOIs
StatePublished - Jun 1 1999

Fingerprint

Pulsed laser deposition
Cyclohexane
cyclohexane
pulsed laser deposition
Diamond
Carbon
carbon
Diamonds
Lasers
Carbon films
diamonds
Excimer lasers
Silicon
Laser beam effects
Hydrocarbons
Absorption spectra
X ray photoelectron spectroscopy
Single crystals
excimer lasers
lasers

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

Cite this

Amorphous hydrogenated carbon synthesized by pulsed laser deposition from cyclohexane. / Lu, Y. F.; Huang, S. M.; Huan, C. H.A.; Luo, X. F.

In: Applied Physics A: Materials Science and Processing, Vol. 68, No. 6, 01.06.1999, p. 647-651.

Research output: Contribution to journalArticle

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