Aligned synthesis of carbon nanotubes by laser-assisted chemical vapor deposition

J. Shi, Y. S. Zhou, Yongfeng Lu, K. J. Yi

Research output: Contribution to conferencePaper

Abstract

With the recent advances in the aligned and position-controlled growth of carbon nanotubes (CNTs), there have been intensive studies in optimizing growth process for fabrication of various CNT-based electronic devices. Using conventional thermal chemical vapor deposition (CVD) method, substrate as well as the chamber need to be globally heated to sufficiently-high reaction temperature. In this study, we report a new method to directly synthesize CNTs across pre-defined electrodes on silicon wafers using laser-assisted chemical vapor deposition (LCVD), which can induce local and instant heating at desired positions. A CW CO2 laser (Synrad Inc, 10.6 μm) as well as a CW Nd:YAG laser (Quantronix Inc, 1064 nm) were used. The carbon feedstock was NH3/C2H2 gas mixtures (volume ratio 10/1), with a process pressure of 80 Torr. Mo electrodes were patterned on silicon substrates by photolithography and focused ion beam. The catalyst islands, which consisted of Fe/Mo nanoporous structures [Fe(NO3) 3.9H2O, MoO2(acac)2 and alumina nanoparticle mixtures] were then transferred to on the electrodes. The substrate temperature was around 700°C, monitored by a pyrometer. Laser irradiation lasted for 3 to 6 min. SWNTs bridging the electrodes were synthesized. Raman spectra indicated that the diameters of the synthesized SWNTs were from 1.2 - 1.4 nm. Electrical properties were characterized by measuring source-drain current against the gate and the source-drain voltage, i.e., I ds-Vg and Ids-Vds respectively. I-V characterization showed that the SWNTs synthesized were mainly semiconducting.

Original languageEnglish (US)
StatePublished - Dec 1 2006
EventICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics - Scottsdale, AZ, United States
Duration: Oct 30 2006Nov 2 2006

Conference

ConferenceICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CityScottsdale, AZ
Period10/30/0611/2/06

Fingerprint

Carbon Nanotubes
Chemical vapor deposition
Carbon nanotubes
electrode
laser
Electrodes
Lasers
substrate
silicon
drain
Substrates
Pyrometers
Continuous wave lasers
electrical property
Aluminum Oxide
Focused ion beams
Drain current
Photolithography
Silicon
Laser beam effects

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Shi, J., Zhou, Y. S., Lu, Y., & Yi, K. J. (2006). Aligned synthesis of carbon nanotubes by laser-assisted chemical vapor deposition. Paper presented at ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics, Scottsdale, AZ, United States.

Aligned synthesis of carbon nanotubes by laser-assisted chemical vapor deposition. / Shi, J.; Zhou, Y. S.; Lu, Yongfeng; Yi, K. J.

2006. Paper presented at ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics, Scottsdale, AZ, United States.

Research output: Contribution to conferencePaper

Shi, J, Zhou, YS, Lu, Y & Yi, KJ 2006, 'Aligned synthesis of carbon nanotubes by laser-assisted chemical vapor deposition' Paper presented at ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics, Scottsdale, AZ, United States, 10/30/06 - 11/2/06, .
Shi J, Zhou YS, Lu Y, Yi KJ. Aligned synthesis of carbon nanotubes by laser-assisted chemical vapor deposition. 2006. Paper presented at ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics, Scottsdale, AZ, United States.
Shi, J. ; Zhou, Y. S. ; Lu, Yongfeng ; Yi, K. J. / Aligned synthesis of carbon nanotubes by laser-assisted chemical vapor deposition. Paper presented at ICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics, Scottsdale, AZ, United States.
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