Advanced materials processing based on interaction of laser beam and a medium

K. Sugioka, K. Obata, K. Midorikawa, M. H. Hong, D. J. Wu, L. L. Wong, Y. F. Lu, T. C. Chong

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

Hybrid laser processing for precision microfabrication of hard materials, in which the interaction of a conventional pulsed laser beam and a medium on the material surface leads to effective ablation and modification, is reviewed. The main role of the medium is to produce strong absorption of the nanosecond laser beam by the materials. Simultaneous irradiation with the vacuum ultraviolet (VUV) laser beam which possesses extremely small laser fluence greatly improves the ablation quality and modification efficiency for hard materials such as fused silica, crystal quartz, sapphire, GaN, and SiC by the ultraviolet (UV) laser irradiation (VUV-UV multiwavelength excitation process). Metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials, resulting in microstructuring, cutting, color marking, printing and selective metallization of glass materials (laser-induced plasma-assisted ablation (LIPAA)). The detailed discussion presented here includes the ablation mechanism of hybrid laser processing.

Original languageEnglish (US)
Pages (from-to)171-178
Number of pages8
JournalJournal of Photochemistry and Photobiology A: Chemistry
Volume158
Issue number2-3
DOIs
StatePublished - Jun 2 2003

Fingerprint

ablation
Laser beams
Ablation
laser beams
Processing
Ultraviolet lasers
ultraviolet lasers
Lasers
interactions
lasers
vacuum
transparence
irradiation
Vacuum
laser materials
Plasmas
quartz crystals
Quartz
Aluminum Oxide
printing

Keywords

  • Ablation
  • F laser
  • Fused silica
  • Hard material
  • Hybrid laser processing
  • Laser-induced plasma
  • Micromachining
  • Multiwavelength excitation
  • Precision microfabrication
  • VUV laser

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Physics and Astronomy(all)

Cite this

Sugioka, K., Obata, K., Midorikawa, K., Hong, M. H., Wu, D. J., Wong, L. L., ... Chong, T. C. (2003). Advanced materials processing based on interaction of laser beam and a medium. Journal of Photochemistry and Photobiology A: Chemistry, 158(2-3), 171-178. https://doi.org/10.1016/S1010-6030(03)00031-5

Advanced materials processing based on interaction of laser beam and a medium. / Sugioka, K.; Obata, K.; Midorikawa, K.; Hong, M. H.; Wu, D. J.; Wong, L. L.; Lu, Y. F.; Chong, T. C.

In: Journal of Photochemistry and Photobiology A: Chemistry, Vol. 158, No. 2-3, 02.06.2003, p. 171-178.

Research output: Contribution to journalArticle

Sugioka, K. ; Obata, K. ; Midorikawa, K. ; Hong, M. H. ; Wu, D. J. ; Wong, L. L. ; Lu, Y. F. ; Chong, T. C. / Advanced materials processing based on interaction of laser beam and a medium. In: Journal of Photochemistry and Photobiology A: Chemistry. 2003 ; Vol. 158, No. 2-3. pp. 171-178.
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