Abstract
Laser microprocessing has been extensively studies with applications in microelectronics and magnetic data storage. In addition to the fundamental aspects of laser materials interactions, we have investigated various possible applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The future prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next-generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory, light emission devices and low cost and smart photonics devices will be addressed.
| Original language | English (US) |
|---|---|
| Title of host publication | ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings |
| State | Published - Dec 1 2002 |
| Event | ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics - Scottsdale, AZ, United States Duration: Oct 14 2002 → Oct 17 2002 |
Publication series
| Name | ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings |
|---|
Conference
| Conference | ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics |
|---|---|
| Country | United States |
| City | Scottsdale, AZ |
| Period | 10/14/02 → 10/17/02 |
Fingerprint
ASJC Scopus subject areas
- Geochemistry and Petrology
- Electrical and Electronic Engineering
Cite this
Advanced laser applications in microelectronics and data storage devices (invited). / Lu, Yongfeng; Song, W. D.; Ren, Z. M.; An, C. W.; Liu, D. M.; Wang, W. J.; Cho, B. J.; Zeng, J. N.; Tan, C. F.
ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2002. (ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Advanced laser applications in microelectronics and data storage devices (invited)
AU - Lu, Yongfeng
AU - Song, W. D.
AU - Ren, Z. M.
AU - An, C. W.
AU - Liu, D. M.
AU - Wang, W. J.
AU - Cho, B. J.
AU - Zeng, J. N.
AU - Tan, C. F.
PY - 2002/12/1
Y1 - 2002/12/1
N2 - Laser microprocessing has been extensively studies with applications in microelectronics and magnetic data storage. In addition to the fundamental aspects of laser materials interactions, we have investigated various possible applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The future prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next-generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory, light emission devices and low cost and smart photonics devices will be addressed.
AB - Laser microprocessing has been extensively studies with applications in microelectronics and magnetic data storage. In addition to the fundamental aspects of laser materials interactions, we have investigated various possible applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The future prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next-generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory, light emission devices and low cost and smart photonics devices will be addressed.
UR - http://www.scopus.com/inward/record.url?scp=57049119096&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=57049119096&partnerID=8YFLogxK
M3 - Conference contribution
SN - 0912035722
SN - 9780912035727
T3 - ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
BT - ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
ER -