Advanced laser applications in microelectronics and data storage devices (invited)

Yongfeng Lu, W. D. Song, Z. M. Ren, C. W. An, D. M. Liu, W. J. Wang, B. J. Cho, J. N. Zeng, C. F. Tan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Laser microprocessing has been extensively studies with applications in microelectronics and magnetic data storage. In addition to the fundamental aspects of laser materials interactions, we have investigated various possible applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The future prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next-generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory, light emission devices and low cost and smart photonics devices will be addressed.

Original languageEnglish (US)
Title of host publicationICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
StatePublished - Dec 1 2002
EventICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics - Scottsdale, AZ, United States
Duration: Oct 14 2002Oct 17 2002

Publication series

NameICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CityScottsdale, AZ
Period10/14/0210/17/02

Fingerprint

Laser applications
Microelectronics
laser
Lasers
Surface cleaning
Cleaning
microelectronics
Dry cleaning
Magnetic storage
Magnetic heads
Photonic devices
MOS devices
Flash memory
Magnetic recording
Texturing
future prospect
Light emission
Steam
tagging
Semiconductor quantum dots

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Lu, Y., Song, W. D., Ren, Z. M., An, C. W., Liu, D. M., Wang, W. J., ... Tan, C. F. (2002). Advanced laser applications in microelectronics and data storage devices (invited). In ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings (ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Advanced laser applications in microelectronics and data storage devices (invited). / Lu, Yongfeng; Song, W. D.; Ren, Z. M.; An, C. W.; Liu, D. M.; Wang, W. J.; Cho, B. J.; Zeng, J. N.; Tan, C. F.

ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2002. (ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lu, Y, Song, WD, Ren, ZM, An, CW, Liu, DM, Wang, WJ, Cho, BJ, Zeng, JN & Tan, CF 2002, Advanced laser applications in microelectronics and data storage devices (invited). in ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings, ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Scottsdale, AZ, United States, 10/14/02.
Lu Y, Song WD, Ren ZM, An CW, Liu DM, Wang WJ et al. Advanced laser applications in microelectronics and data storage devices (invited). In ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2002. (ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
Lu, Yongfeng ; Song, W. D. ; Ren, Z. M. ; An, C. W. ; Liu, D. M. ; Wang, W. J. ; Cho, B. J. ; Zeng, J. N. ; Tan, C. F. / Advanced laser applications in microelectronics and data storage devices (invited). ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2002. (ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
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AU - Cho, B. J.

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