Additive and subtractive 3D-microfabrication of micro/nanostructures

Yongfeng Lu, W. Xiong, L. J. Jiang, Y. S. Zhou, Y. Gao, T. Baldacchini, J. F. Silvain, L. Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015
PublisherOptical Society of America (OSA)
ISBN (Electronic)9781467374750
StatePublished - Jan 1 2019
Event2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 - Munich, Germany
Duration: Jun 21 2015Jun 25 2015

Publication series

NameProceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015

Conference

Conference2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015
CountryGermany
CityMunich
Period6/21/156/25/15

Fingerprint

Microfabrication
Nanostructures

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Lu, Y., Xiong, W., Jiang, L. J., Zhou, Y. S., Gao, Y., Baldacchini, T., ... Jiang, L. (2019). Additive and subtractive 3D-microfabrication of micro/nanostructures. In Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 (Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015). Optical Society of America (OSA).

Additive and subtractive 3D-microfabrication of micro/nanostructures. / Lu, Yongfeng; Xiong, W.; Jiang, L. J.; Zhou, Y. S.; Gao, Y.; Baldacchini, T.; Silvain, J. F.; Jiang, L.

Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America (OSA), 2019. (Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lu, Y, Xiong, W, Jiang, LJ, Zhou, YS, Gao, Y, Baldacchini, T, Silvain, JF & Jiang, L 2019, Additive and subtractive 3D-microfabrication of micro/nanostructures. in Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015, Optical Society of America (OSA), 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015, Munich, Germany, 6/21/15.
Lu Y, Xiong W, Jiang LJ, Zhou YS, Gao Y, Baldacchini T et al. Additive and subtractive 3D-microfabrication of micro/nanostructures. In Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America (OSA). 2019. (Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015).
Lu, Yongfeng ; Xiong, W. ; Jiang, L. J. ; Zhou, Y. S. ; Gao, Y. ; Baldacchini, T. ; Silvain, J. F. ; Jiang, L. / Additive and subtractive 3D-microfabrication of micro/nanostructures. Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015. Optical Society of America (OSA), 2019. (Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015).
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