Additive and subtractive 3D-microfabrication of micro/nanostructures

Y. F. Lu, W. Xiong, L. J. Jiang, Y. S. Zhou, Y. Gao, T. Baldacchini, J. F. Silvain, L. Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015
PublisherOptical Society of America (OSA)
ISBN (Electronic)9781467374750
Publication statusPublished - Jan 1 2019
Event2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 - Munich, Germany
Duration: Jun 21 2015Jun 25 2015

Publication series

NameProceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015

Conference

Conference2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015
CountryGermany
CityMunich
Period6/21/156/25/15

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Lu, Y. F., Xiong, W., Jiang, L. J., Zhou, Y. S., Gao, Y., Baldacchini, T., ... Jiang, L. (2019). Additive and subtractive 3D-microfabrication of micro/nanostructures. In Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 (Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015). Optical Society of America (OSA).