Adaptive laser shock micro-forming for MEMS device applications

R. Zou, M. Wang, S. L. Wang, S. Li, C. Zhang, L. Deng, Yongfeng Lu, K. P. Chen

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Laser shock micro-forming is a non-thermal laser forming method that uses laser-induced shockwave to modify surface properties and to adjust shapes and geometry of work pieces. The magnitude and spatial distribution of the laser-induced shockwaves depend on the energy profiles of the laser beam focused on sample surfaces. In this paper, we present an adaptive optical technique to engineer spatial profiles of laser beams to control the shapes, sizes, and locations of the laser-induced shockwaves and the resulting forming features. Using a spatial light modulator, this adaptive laser beam forming tool was used to process free-standing MEMS structures in aluminum, which has led to highly uniform forming features. Shockwave simultaneously excited by multiple laser beams generated by the spatial light modulator and its effects on the micro-forming process were also studied. The results presented in this paper show that the adaptive optics laser beam forming is an effective and flexible method to generate shockwave with various shapes and sizes of wavefront and at multiple locations for laser processing at microscales.

Original languageEnglish (US)
Pages (from-to)3875-3883
Number of pages9
JournalOptics Express
Volume25
Issue number4
DOIs
StatePublished - Feb 20 2017

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microelectromechanical systems
shock
laser beams
lasers
beamforming
light modulators
profiles
adaptive optics
microbalances
surface properties
engineers
spatial distribution
aluminum
geometry
energy

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Zou, R., Wang, M., Wang, S. L., Li, S., Zhang, C., Deng, L., ... Chen, K. P. (2017). Adaptive laser shock micro-forming for MEMS device applications. Optics Express, 25(4), 3875-3883. https://doi.org/10.1364/OE.25.003875

Adaptive laser shock micro-forming for MEMS device applications. / Zou, R.; Wang, M.; Wang, S. L.; Li, S.; Zhang, C.; Deng, L.; Lu, Yongfeng; Chen, K. P.

In: Optics Express, Vol. 25, No. 4, 20.02.2017, p. 3875-3883.

Research output: Contribution to journalArticle

Zou, R, Wang, M, Wang, SL, Li, S, Zhang, C, Deng, L, Lu, Y & Chen, KP 2017, 'Adaptive laser shock micro-forming for MEMS device applications', Optics Express, vol. 25, no. 4, pp. 3875-3883. https://doi.org/10.1364/OE.25.003875
Zou R, Wang M, Wang SL, Li S, Zhang C, Deng L et al. Adaptive laser shock micro-forming for MEMS device applications. Optics Express. 2017 Feb 20;25(4):3875-3883. https://doi.org/10.1364/OE.25.003875
Zou, R. ; Wang, M. ; Wang, S. L. ; Li, S. ; Zhang, C. ; Deng, L. ; Lu, Yongfeng ; Chen, K. P. / Adaptive laser shock micro-forming for MEMS device applications. In: Optics Express. 2017 ; Vol. 25, No. 4. pp. 3875-3883.
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