Acoustic emission in laser surface cleaning for reed-time monitoring

Yong Feng Lu, Yoshinobu Aoyagi

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Real-time monitoring of surface cleanness in laser dry cleaning has been achieved by monitoring the acous waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave emitt from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Removal surface contaminants can result in a weakened laser-induced acoustic wave. The surface cleanness, therefore, c be monitored in real time by detecting the amplitude and frequency of the acoustic wave during the laser clean! process. This phenomenon provides the laser cleaning system with real-time feedback during the cleaning proce.

Original languageEnglish (US)
Pages (from-to)L1557-L1560
JournalJapanese Journal of Applied Physics
Volume34
Issue number11
DOIs
StatePublished - Nov 1995

Fingerprint

Surface cleaning
acoustic emission
Acoustic emissions
cleaning
Lasers
Monitoring
lasers
Acoustic waves
Laser beam effects
acoustics
Cleaning
Dry cleaning
irradiation
Pulsed lasers
contaminants
pulsed lasers
Impurities
Feedback
Substrates

Keywords

  • Acoustic emission
  • Excimer laser
  • Laser cleaning
  • Real-time monitoring

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Acoustic emission in laser surface cleaning for reed-time monitoring. / Lu, Yong Feng; Aoyagi, Yoshinobu.

In: Japanese Journal of Applied Physics, Vol. 34, No. 11, 11.1995, p. L1557-L1560.

Research output: Contribution to journalArticle

@article{de773f8c7d1f479995e068a6bc02f07f,
title = "Acoustic emission in laser surface cleaning for reed-time monitoring",
abstract = "Real-time monitoring of surface cleanness in laser dry cleaning has been achieved by monitoring the acous waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave emitt from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Removal surface contaminants can result in a weakened laser-induced acoustic wave. The surface cleanness, therefore, c be monitored in real time by detecting the amplitude and frequency of the acoustic wave during the laser clean! process. This phenomenon provides the laser cleaning system with real-time feedback during the cleaning proce.",
keywords = "Acoustic emission, Excimer laser, Laser cleaning, Real-time monitoring",
author = "Lu, {Yong Feng} and Yoshinobu Aoyagi",
year = "1995",
month = "11",
doi = "10.1143/JJAP.34.L1557",
language = "English (US)",
volume = "34",
pages = "L1557--L1560",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "11",

}

TY - JOUR

T1 - Acoustic emission in laser surface cleaning for reed-time monitoring

AU - Lu, Yong Feng

AU - Aoyagi, Yoshinobu

PY - 1995/11

Y1 - 1995/11

N2 - Real-time monitoring of surface cleanness in laser dry cleaning has been achieved by monitoring the acous waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave emitt from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Removal surface contaminants can result in a weakened laser-induced acoustic wave. The surface cleanness, therefore, c be monitored in real time by detecting the amplitude and frequency of the acoustic wave during the laser clean! process. This phenomenon provides the laser cleaning system with real-time feedback during the cleaning proce.

AB - Real-time monitoring of surface cleanness in laser dry cleaning has been achieved by monitoring the acous waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave emitt from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Removal surface contaminants can result in a weakened laser-induced acoustic wave. The surface cleanness, therefore, c be monitored in real time by detecting the amplitude and frequency of the acoustic wave during the laser clean! process. This phenomenon provides the laser cleaning system with real-time feedback during the cleaning proce.

KW - Acoustic emission

KW - Excimer laser

KW - Laser cleaning

KW - Real-time monitoring

UR - http://www.scopus.com/inward/record.url?scp=0029409924&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029409924&partnerID=8YFLogxK

U2 - 10.1143/JJAP.34.L1557

DO - 10.1143/JJAP.34.L1557

M3 - Article

AN - SCOPUS:0029409924

VL - 34

SP - L1557-L1560

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 11

ER -