A theoretical model for laser cleaning of microparticles in a thin liquid layer

Yong Feng Lu, Yong Zhang, Wen Dong Song, Daniel S.H. Chan

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

A theoretical model for removal of tiny particles from solid surface by laser cleaning with a thin liquid layer is established by taking adhesion force and cleaning force into account. When pulsed laser irradiates on the solid surface coated with a thin liquid film, a sheet of liquid near the liquid/substrate interface can be superheated through thermal diffusion. The rapid growth of vapor bubbles inside the superheated liquid can generate transient stress wave with high pressure, large enough to expel micron and sub-micron particles from the contaminated surface. Through calculating adhesion force and cleaning force, the cleaning threshold of laser fluence can be predicted from this theoretical model and the difference between cleaning force and adhesion force increases with increasing of laser fluence, leading to higher cleaning efficiency.

Original languageEnglish (US)
Pages (from-to)L1330-L1332
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume37
Issue number11 PART A
StatePublished - Nov 1 1998

Fingerprint

microparticles
cleaning
Cleaning
Lasers
Liquids
liquids
lasers
adhesion
Adhesion
solid surfaces
fluence
stress waves
Thermal diffusion
Liquid films
thermal diffusion
Bubbles (in fluids)
Pulsed lasers
pulsed lasers
bubbles
Vapors

Keywords

  • Adhesion force
  • Cleaning force
  • Saturation vapor pressure
  • Steam laser cleaning
  • Stress wave

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

A theoretical model for laser cleaning of microparticles in a thin liquid layer. / Lu, Yong Feng; Zhang, Yong; Song, Wen Dong; Chan, Daniel S.H.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 37, No. 11 PART A, 01.11.1998, p. L1330-L1332.

Research output: Contribution to journalArticle

Lu, Yong Feng ; Zhang, Yong ; Song, Wen Dong ; Chan, Daniel S.H. / A theoretical model for laser cleaning of microparticles in a thin liquid layer. In: Japanese Journal of Applied Physics, Part 2: Letters. 1998 ; Vol. 37, No. 11 PART A. pp. L1330-L1332.
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